Addressable test chip test system

ABSTRACT

A test apparatus for testing electrical parameters of a target chip includes: a function generator; a switch matrix module; a plurality of source measurement units (SMUs); at least one of the SMUs is configured to provide power supply for the target chip; at least one of the SMUs is coupled to the switch matrix module; and at least two of said SMUs are test SMUs coupled to ports of the target chip and the function generator.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation of U.S. Pat. Appl. Ser. No. 17/648,935 filed on Jan. 25, 2022 (now Pat. No. 11,668,748 issued on Jun. 6, 2023), which is a continuation of U.S. Pat. Appl. Ser. No. 16/940,372 filed on Jul. 27, 2020 (now Pat. No. 11,243,251 issued on Feb. 8, 2022), which is a continuation of U.S. Pat. Appl. Ser. No. 16/377,422 filed on Apr. 8, 2019 (now Pat. No. 10,725,101 issued on Jul. 28, 2020), which is a continuation of U.S. Pat. Appl. Ser. No. 15/859,306 filed on Dec. 29, 2017 (now Pat. No. 10,254,339 issued on Apr. 9, 2019), which claims priority to Chinese Patent Application No. CN 201611260100.3 filed on Dec. 30, 2016. U.S. Pat. Appl. Ser. No. 16/377,422 also claims priority to Chinese Patent Application Nos. CN 201822254087.1 filed on Dec. 29, 2018, CN 201822250453.6 filed on Dec. 29, 2018, and CN 201920376170.8 filed on Mar. 22, 2019. U.S. Pat. Appl. Ser. No. 16/940,372 also claims priority to Chinese Patent Application Nos. CN 202010687645.2 filed on Jul. 16, 2020, and CN 202021406599.6 filed on Jul. 16, 2020. U.S. Pat. Appl. Ser. No. 17/648,935 also claims priority to Chinese Patent Application No. CN 202111501691.X filed on Dec. 9, 2021. The present disclosure also claims priority to Chinese Patent Application No. CN 202310622198.6 filed on May 29, 2023. The disclosures of the above-referenced applications are hereby incorporated by reference in their entirety.

BACKGROUND

As the design scale of integrated circuits (IC) continues to expand, density of electronic devices on a single chip is growing, and the characteristic dimension of electronic devices is diminishing. The IC process flow contains many complex processes, and each process has a specific process deviation, which resulting in the yield reduction of IC chips. Test chip can be configured to monitor and improve the yield of IC manufacture effectively, it is very effective to obtain the necessary data of manufacturing process and yield improvement through testing test chip.

Short-ranged test chip and addressable test chip are two types of the test chips frequently used in the manufacture of IC. Short-ranged test chip has been widely used because of its short production cycle, flexible test and high accuracy. However, in the traditional short-ranged test chip, each device under to test (DUT) needs to be connected to two or more pads, therefore, the disadvantage of short-ranged test chip is very obvious: low utilization rate of area. The addressable test chip uses decoders and the switching circuit to achieve the purpose of sharing pads between DUTs, but the type of test chip requires more complicated peripheral circuit. The simplification for the peripheral circuit for the addressable test chip has become the main problem to limit the wide application of the addressable test chip. A technical improvement on this problem has been mentioned in CN patent applications ZL201010612475.8, ZL 201520437526.6 etc.

SUMMARY

The inventors of the present disclosure have recognized that, the abovementioned technical improvements on the peripheral circuit are successful, the number of DUTs is increased greatly in comparison with short-range test chip, but leads to test cycle growth correspondingly, and long periods of testing cannot meet advanced technology nodes’ (such as 14 nm, 10 nm, or 7 nm) requirement; on the other hand, the DUT density of existing addressable test chip is less than 1000/mm², the advanced technology nodes needs more high density to improve the failure detection rate and save the cost of manufacturing area.

To solve the technical problem of long test periods of addressable test chips in existing technology, this disclosure provides a test system that meets the requirements of testing addressable test chip under the advanced technology, which can improve the test efficiency effectively and provide different test modes according to user’s needs. Moreover, the disclosure also discloses a new type of address register; a new type of prober card; a new type of high-density addressable test chip, which can accommodate DUTs more than 1000/ mm² and increase the accuracy of measurement.

An addressable test chip test system includes a test apparatus, a probe card and an addressable test chip, the test apparatus connects to the addressable test chip through the probe card to constitute a test path. An address register is integrated in the probe card or the addressable test chip.

The address register includes a plurality of edge-triggered flip-flop registers, at least one counter logic, at least one shifter logic, a selective addressing modular and at least two multiplexer; the input ports include a reset signal RST, a clock signal CLK, a shift enable signal SE, a shift data input signal SI, the outputs ports include an address signal ADDR and a code mode signal GB; the code mode signal GB indicates whether the address signal ADDR is binary or gray. The plurality of edge-triggered flip-flop registers includes several first edge-triggered flip-flop registers for receiving address signal, several second edge-triggered flip-flop registers for receiving mode control signal and several third edge-triggered flip-flop registers for receiving auxiliary data; the one or more counter logics includes a first counter logic; the two or more multiplexers includes a first multiplexer and a second multiplexers.

The internal connection of the address register can be as follows: an input D of the plurality of edge-triggered flip-flop registers is coupled to a data output of the first multiplexer; an input R of the plurality of edge-triggered flip-flop registers is coupled to a reset (RST) pad of the address register; an input CK of the plurality of edge-triggered flip-flop registers is coupled to a clock (CLK) pad of the address register; an output Q of the several first edge-triggered flip-flop registers is further coupled to an address (ADDR) pad of the address register, an output Q of the several second edge-triggered flip-flop registers is further coupled to a code mode (GB) pad of the address register; the inputs of the shifter logic are coupled to an output Q of the plurality of edge-triggered flip-flop registers and the shift data input (SI) pad of the address register; an input of the first counter logic is coupled to an output Q of the several first edge-triggered flip-flop registers; an input of the selective addressing modular is coupled to an output Q of the several first and third edge-triggered flip-flop registers; the inputs of the second multiplexer are coupled to an output Q of the several second edge-triggered flip-flop registers, an output of the first counter logic and an output of the selective addressing modular; the inputs of the first multiplexer are coupled to the shift enable signal SE, an output of the second multiplexer, and an output of the shifter logic.

The selective addressing modular has the functions as follow: the current address is confirmed whether to belong to the address area region to be addressed; if the current address belongs to the address area region to be addressed, the current address is processed to next address (address+1) and outputs the next address signal into the second multiplexer; if the current address belongs to the address area that does not required addressing, then skips the address area and outputs the starting address signal of the next address area region to be addressed as next address into the second multiplexer.

Based on the function of the address register, the address register supports at least two addressing modes for continuous test, including binary mode and selective mode. In the binary mode next address calculation is as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the first counter logic processes the current address to next address (address+1) and outputs the next address signal into the second multiplexer.

In the selective mode, the next address calculation can be as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the third edge-triggered flip-flop registers receives auxiliary data as selection table, the information in the selection table is about address area whether region to be addressed, according to this information the current address is confirmed whether to belong to the address area region to be addressed; if the current address belongs to the address area region to be addressed, the current address is processed to next address (address+1) and outputs the next address signal into the second multiplexer; if the current address belongs to the address area that does not required addressing, then skips this address area and outputs the starting address signal of the next address area region to be addressed as next address into the second multiplexer.

The mode control signal received from the second edge-triggered flip-flop registers controls the second multiplexer, the signal chooses the second multiplexer to outputs the next address signal of the selected mode. The shift enable signal SE controls the first multiplexer, and the mode control signal controls the second multiplexer; the shift enable signal SE chooses one device to work between the continuous addressing mode and the shifter logic. When SE=1, the shifter logic is selected, each time the edge of the clock signal is changed, the address signal shifts 1 bit to right, the lowest bit is discarded, the highest bit is changed to SI; any address signal can be inputted from the outside through this mode. When SE=0, the second multiplexer in the address register is selected, and the address register works in continuous addressing mode. The mode control signal chooses the second multiplexer to outputs the next address signal of the selected mode.

In some embodiments, the address register also includes a scan data output signal (SO) output port, which outputs a bit of the address signal which is configured to check whether DUT is the one we want to test. In some embodiments, the scan data output signal SO is the lowest bit of the address signal.

In some embodiments, the address register further includes at least one gray decoder and at least one gray encoder, the one or more counter logics further include a second counter logic. An input of the gray decoder is connected to an output Q of the several first edge-triggered flip-flop registers, an output of the gray decoder is connected to an input of the second counter logic. An input of the gray encoder is connected to an output of the second counter logic, an output of the gray encoder is connected to an input of the second multiplexer. The address register with gray decoder and gray encoder is able to convert address signal between binary code and gray code.

Based on the function of the address register, the address register further supports gray mode for continuous test. In the gray mode next address calculation is as follows: the first edge-triggered flip-flop registers receives current address signal in gray code format, the gray decoder converts the current address form gray to binary, then the second counter logic processes the current address to next address (address+1), finally the gray encoder converts the next address from binary to gray and outputs the next address signal into the second multiplexer. In some embodiments, the first counter logic and the second counter logic are the same one, and the address register also includes a control logic, the control logic chooses this counter logic to work as the function of the first counter logic or the function of the second counter logic.

In some embodiments, the aforementioned address register is integrated in the probe card. Because the manufacturing cost of the probe card is low, the manufacturing technology is stable and mature, and the address register is not affected by the IC manufacturing process, so that the performance of the address register in the probe card is stable and the test accuracy is guaranteed. In addition, the probe card can be recycled for saving the cost of chip testing and production.

In some embodiments, the aforementioned address register is integrated in the addressable test chip. The addressable test chip is a circuit design technology which combines the addressing circuit with the test chip technology. Common addressable test chip includes a plurality of pads, addressing circuit, switching circuit and DUTs.

The address register integrated in the addressable test chip connects to address signal pads, the addressing circuit connects to ADDR and GB of address register, the addressing circuit also connects to the switching circuit and outputs address select signals to control switches of the switching circuit in on-state or off-state; the switching circuit connects to DUTs and selects a single DUT to be tested through the switch state; the addressing circuit also connects to the power pads and the power pads supply power for the whole test chip, the switching circuit also connects to test pads through signal lines and the test pads supply test points for the whole test chip.

By configuring the number of the first edge-triggered flip-flop registers, the number of the second edge-triggered flip-flop registers and the number of the third edge-triggered flip-flop registers, defining the mode control signal received by the second edge-triggered flip-flop registers, and defining auxiliary data received by the third edge-triggered flip-flop registers, the addressing mode of the addressable test chip can be extended.

In some embodiments, for continuous test, the addressable test chip supports at least three addressing modes, including binary mode, gray mode and selective mode. In the binary mode next address calculation is as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the first counter logic processes the current address to next address (address+1) and outputs the next address signal into the second multiplexer.

In the gray mode next address calculation is as follows: the first edge-triggered flip-flop registers receives current address signal in gray code format, the gray decoder converts the current address form gray to binary, then the second counter logic processes the current address to next address (address+1), finally the gray encoder converts the next address from binary to gray and outputs the next address signal into the second multiplexer.

In the selective mode, the next address calculation can be as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the third edge-triggered flip-flop registers receives auxiliary data as selection table, the information in the selection table is about address area whether region to be addressed, according to this information the current address is confirmed whether to belong to the address area region to be addressed; if the current address belongs to the address area region to be addressed, the current address is processed to next address (address+1) and outputs the next address signal into the second multiplexer; if the current address belongs to the address area that does not required addressing, then skips this address area and outputs the starting address signal of the next address area region to be addressed as next address into the second multiplexer.

The mode control signal received from the second edge-triggered flip-flop registers controls the second multiplexer, the signal chooses the addressable test chip to work in binary mode, gray mode or selective mode, i.e. to choose the multiplexer to outputs the next address signal of the selected mode.

In some embodiments, the size of the minimum address area is predefined for the selection table, whether each minimum address area by order is an address area region to be addressed depends on the data in the selection table is 1 or 0.

In some embodiments, the addressing circuit includes at least one row decoder and at least one column decoder, the switching circuit includes at least one row switching circuit and at least one column switching circuit, the row switching circuit is connected to the row decoder to select the row of the selected DUT, the column switching circuit is connected to the column decoder to select the column of the selected DUT.

When testing, the row decoder outputs address select signals to control switches of the row switching circuit in an on-state or an off-state, the row switching circuit is configured to select a single row of DUTs; the column decoder outputs address select signals to control switches of the column switching circuit in an on-state or an off-state, the column switching circuit is configured to select a single column of DUTs; a single DUT of this row and this column is selected to be test through the on-state or off-state of the switches.

The switching circuit can be composed by common switches or transmission gates, the transmission gate often used as switch due to smaller resistance compared with common switch. The requirement of testing accuracy becomes higher and higher with the progress of integrated circuit process, the background leakage of transmission gate cannot be ignored while high test accuracy requirement.

In some embodiments, the switching circuit includes a multi-stage transmission gate circuit having multiple transmission gate structures; each stage of the circuit includes at least one transmission gate structure; each transmission gate structure includes at least one transmission gate; the output end of each high-level transmission gate is coupled to low-level transmission gate(s)′ input ends of a low-level transmission gate structure, the output ends of the lowest level transmission gates are coupled to terminals of DUTs, the input ends of the highest level transmission gate are coupled to test pads; the input end of each transmission gate can also be connected to the decoder in the addressing circuit.

In some embodiments, for multi-stage transmission gate structures, each same-level transmission gate connected to the same number of low-level transmission gates to ensure the same test accuracy of each DUT.

In some embodiments, the input ends of the same-level transmission gates are connected with the same decoder.

The multi-stage transmission gate circuit is used in the addressable test chip as switching circuit, which can reduce leakage current effectively. Therefore, the electrical parameters of chips can be tested accurately.

The switching circuit as a part of addressable test chip, whether using common switches, transmission gates, or multi-stage transmission gate structures, the IR-drop of switching circuit cannot be ignored in some testing requirement, such as small resistance measurement. To solve this problem, in some embodiments, a couple of forcing circuit and sensing circuit are configured to each DUT array in the addressable test chip.

Defining a forcing circuit includes an addressing circuit and a switching circuit, defining a sensing circuit includes an addressing circuit and a switching circuit. The addressable test chip is configured with forcing circuit and sensing circuit includes a plurality of pads, at least one forcing circuit, at least one sensing circuit and DUTs.

The DUTs can be divided into one or more DUT arrays, a couple of forcing circuit and sensing circuit are configured to each DUT array, one addressing circuit can be shared by a couple of forcing circuit and sensing circuit; each forcing circuit includes a force addressing circuit and a force switching circuit, each sensing circuit includes a sense addressing circuit and a sense switching circuit; for each DUT array, the force addressing circuit and sense addressing circuit connect to address signal pads and obtain address signal through the address signal pads, and also connect to the force switching circuit and sense switching circuit respectively, and output address select signals to control switches of the force switching circuit and sense switching circuit in on-state or off-state; the force and sense switching circuits connect to DUTs and select a same DUT to be tested through the state of switches. The force addressing circuit and sense addressing circuit also connect to the power pads and the power pads supply power for the whole test chip, the force and sense switching circuits also connect to test pads and the test pads supply test points for the whole test chip.

A design method of peripheral circuit in a test chip includes the following steps: Obtain the information of a device array, obtain the information of the DUTs selected from the device array; Obtain the information of the peripheral circuit area in the test chip for placing the peripheral circuit; Design the peripheral circuits according to the DUTs in the edge row or/and edge column of the device array, including: In the peripheral circuit area, configure the corresponding peripheral circuit units for the DUTs in the edge row or/and edge column of the device array, and place the peripheral circuit units, connect the DUTs of the device array and the corresponding peripheral circuit units through a wiring to form a peripheral circuit, which is used to control the DUTs to be tested through the state of the peripheral circuit units.

In some embodiments, selecting the DUTs from the device array to be tested includes: select several DUTs in the edge row or/and edge column of the device array, and, when the device array is multiple rows and columns, select several DUTs in the remaining rows or/and remaining columns of the device array.

In some embodiments, a corresponding peripheral circuit unit is configured for each DUT in the edge row or/and edge column of the device array. The preset maximum number of peripheral circuit units configured for the DUTs in an edge row is M, or/and, the preset maximum number of peripheral circuit units configured for the DUTs in an edge column is N, write the number of devices in an edge rows or/and edge columns as K, so selecting the DUTs to be tested from the edge row or/and edge column of the device array is including: if the number of devices in an edge row K≤M or/and the number of devices in an edge column K<,N, select all the devices to be DUTs in the edge row or/and edge column; if the number of devices in an edge row K>M, select M devices to be DUTs in the edge row, or/and the number of devices in an edge column K>N, select N devices to be DUTs in the edge column.

In some embodiments, the row direction of an edge row or the column direction of the edge column is defined as X direction, and the peripheral circuit units to be placed meet the following three conditions:

-   The first condition: the projection of the peripheral circuit unit     and the projection of its corresponding DUT overlap in the X     direction; -   The second condition: there is no overlap in the X direction of the     projection of peripheral circuit units in the same row or column; -   The third condition: the peripheral circuit unit are placed within     the peripheral circuit area.

In some embodiments, the steps of placing the peripheral circuit units are as follows:

-   Step 1: based on the first condition, place the peripheral circuit     units in a single row, i.e., set i =1, and judge whether the     peripheral circuit units after the single row arrangement meet the     second and third conditions: if yes, the position arrangement of the     peripheral circuit units is completed, the steps end, if the second     or third condition is not met, proceed to Step 2; -   Step 2: move either of the two overlapping peripheral circuit units     in the X direction to a new row by the moving direction is     perpendicular to the X direction, and/or move the peripheral circuit     units which beyond the peripheral circuit area to a new row based on     the first condition, i.e. increase one row in the array of the     peripheral circuit units; and judge whether the rearranged     peripheral circuit units meet the second and third conditions: if     yes, the position arrangement of the peripheral circuit units is     completed, the steps end, if the second or third condition is not     met, perform this Step 2 again.

In some embodiments, Step 1 and Step 2 also include: when the peripheral circuit units are determined to meet the second and third conditions, adjust the peripheral circuit units’ positions in the X direction to optimize the location arrangement based on the first, second and third conditions, further reduce the length of the wiring for connecting the DUTs and the corresponding peripheral circuit units.

In some embodiments, the Step 1 includes: when the peripheral circuit units are determined not to meet the second and third conditions, adjust the peripheral circuit units’ positions in the X direction to optimize the location arrangement based on the first, second and third conditions, and judge whether the peripheral circuit units after the single row arrangement meet the second and third conditions: if yes, the position arrangement of the peripheral circuit units is completed, the steps end, if the second or third condition is not met, proceed to Step 2.

In some embodiments, the peripheral circuit area is between the device array and the pad region, or/and between the device array and the edge of the test chip.

In some embodiments, the device array is composed of the same devices, and the peripheral circuit is composed of the same peripheral circuit units. In other embodiments, the device array can be comprised of several different types of devices, and the peripheral circuit can also be comprised of different peripheral circuit units.

The above design method of peripheral circuit in a test chip can simplifies the wiring layout, reduce the number of metal layers, and make the sum of length of the wiring for connecting the DUTs and the corresponding peripheral circuit units to achieve the shortest. The advantages of this design method of peripheral circuit in a test chip are obvious.

A test chip including: a plurality of test pads, a plurality of DUTs, and at least one peripheral circuit(s); wherein, the DUTs are divided into at least one device array(s), the peripheral circuit is designed by the above design method of peripheral circuit in a test chip to improve the device density in the test chip.

The test apparatus includes a function generator, a switch matrix module, several source measurement units (SMUs) and at least a database; at least one SMU is configured to provide power supply for the test object (chip to be tested); at least one SMU is connected to the switch matrix module; at least one SMU is configured to connect the address register; some SMUs are test SMUs, these test SMUs connect to the ports of DUTs to realize electrical test, and these test SMUs also connect to the function generator; the database configured to store test results.

Some embodiments of the present disclosure provide an ultra-high-speed measurement method for high-density test chips, wherein the test equipment is equipped with a function generator, an address register connected to the function generator and SMUs; The ultra-high-speed measurement method includes the following steps: presetting the required test signals and writing them to the memory of the function generator and SMU; controlling the function generator and the SMU to generate synchronously triggered CLK signals and DF signals, respectively; the address register switching addresses based on the transformation of waveforms in the CLK signals, triggering the SMU to continuously sample different addresses based on the frequency of the DF signals; acquiring the sampling data and deriving the valid measurement value for each address from the sampling data.

In some embodiments, the sampling frequency for continuous sampling by the SMU is multiplicatively related to the address switching frequency; each address corresponds to one or more sampling data, and the valid measurement value corresponding to each address is derived from the analysis of the sampling data.

In some embodiments, execution of the ultra-high speed measurement method is based on a predetermined test algorithm in which signal configuration information is predetermined and a trigger signal is sent through the test algorithm control; the test equipment receives and transmits the trigger signal and simultaneously triggers the function generator and the SMU.

In some embodiments, the trigger signal includes the frequency parameter of the CLK signal and the continuous sampling time of the SMU.

In some embodiments, a programmable logic device, a synchronous trigger module, and a clock module are included on the test equipment. The programmable logic device acquires the trigger signal of the test algorithm and transmits it to the synchronous trigger module. The synchronous trigger module then controls the function generator and the clock module to synchronously generate the CLK signal and the clock signal. The clock signal of the clock module is transmitted to the SMU to generate a synchronously triggered DF signal.

In some embodiments, the programmable logic devices include: field programmable gate array (FPGA).

In some embodiments, the sampling data includes SO voltage and DF current, and the method for determining the valid measurement value corresponding to each address from multiple sampling data corresponding to each address comprises the following steps:

determination of a stability interval in each address using the SO voltage switching situation; Analyzing a number of the DF currents to determine the valid measurements located within the stability interval of each address; Assign the analyzed valid measurement values to each address.

In some embodiments, the determination of the stability interval in each address based on the SO voltage transition condition includes the following steps: arrangement of the measured SO voltages in measurement order; determining (each) voltage level of the SO voltage based on its numerical relationship with the operating voltage VDD; Determination of the change in voltage level of (each) SO voltage based on the voltage level difference from the preceding SO voltage. The validity of measurement points within the stability interval is determined by the change in voltage level between adjacent SO voltage.

In some embodiments, Determine the valid measurement points that fall within the stability interval specifically by: given that the voltage of one SO and the voltages of the adjacent SOs before and after it do not change, this point is selected as a valid measurement point.

In some embodiments, the procedure for selecting valid measurement values is as follows: obtaining a first current measurement in the stabilization interval; obtaining the current average of the plurality of DF currents in the stability interval; taking the median of the numerous DF currents in the stability interval.

In some embodiments, another technical solution of the present invention also provides a test system including a function generator, SMUs, and a programmable logic device, wherein the programmable logic device obtains the trigger signal of the test algorithm and transmits it to the function generator and the SMU, and synchronously triggers the function generator and the SMU to generate the CLK signal and the DF signal, respectively. The address register connected to the function generator switches the address according to the CLK signal, while the SMU performs continuous sampling according to the synchronously triggered DF signal, with each address corresponding to a plurality of sampled data.

In some embodiments, a further technical solution of the present invention also provides a test system with a function generator, SMUs, a programmable logic device, a synchronous trigger module, and a clock module; the programmable logic device obtains the trigger signal of the test algorithm and transmits it to the synchronous trigger module, the synchronous trigger module controls the function generator and the clock module to synchronously generate clock signals of different frequencies; the address register connected to the function generator switches the address according to the address register connected to the function generator switches the address according to the transformation of the waveform in the clock signal; and the clock signal of the clock module is transmitted to the SMU to generate the synchronous trigger DF signal and conduct continuous sampling, each address corresponds to one or more sampling data.

In some embodiments, this test system includes a data processing software unit for determining the valid measurement value corresponding to each address from the sampled data.

In some embodiments, all the SMUs in test apparatus are connected to the probe card through the switch matrix module.

The addressable test chip test system of the disclosure includes the aforementioned test apparatus, a probe card and an addressable test chip, and the aforementioned new type of address register is integrated in the probe card or the addressable test chip.

The structure of the test system according to some embodiments can be as follows: the address registers connected to the addressing circuits in the addressable test chips; at least one SMU in the test apparatus connects to the power pads in the addressable test chip through the probe card, and provides power to the test chip in the test apparatus; at least one SMU connected to the switch matrix module, and the switch matrix module connected to the address register; the function generator and at least one SMU are respectively connected to the address register; at least two SMUs are test SMUs, and the test SMUs connected to the switching circuit of the test chip through the probe card, so as to provide voltage and realize data test; the function generator also connected to these test SMUs.

In some embodiments, the buffers are configured to the address circuit to solve the problem of too long metal wiring connection and signal integrity.

In some embodiments, a buffer is configured in the test apparatus or the probe card of the test system, and the function generator doesn’t connect directly with the test SMUs, but is connected to the test SMUs through the buffer.

In some embodiments, more SMUs are configured to keep the test system more stable, two or more SMUs are required to supply power; sometimes, when the parallel testing is needed, several DUTs need to be test simultaneously, one test results output terminal needs to be configured as one SMU.

Before the test system is tested, the test apparatus is configured to connect with the probe card; in response to the test requirement, the test apparatus controls the probe card to connect with the addressable test chip; the function generator generates clock pulse signals, the clock pulse signal stimulates the address register to generate address signals, the address signal is decoded to address select signals through addressing circuit in the addressable test chip, the address select signal controls switching circuit to select a DUT to be tested, at the same time, the clock pulse signal generated by the function generator is output into the test SMUs in the test apparatus to trigger the test apparatus to enter test state; therefore, the test apparatus will test the selected DUT immediately when the DUT is selected.

Based on the function of common address register, when the shift enable signal SE=1, the shifter logic in the address register is selected, and the address register has the same function of a shift register, the test chip entries the address configuration mode: each time the edge of the clock signal is changed, the address register 1) shifts all address bits right 1 bit, 2) reads the shift data input SI into the highest address bit, and 3) the lowest address bit is discarded. After all address bits have been shifted in, the address register is configured to the desired address. When the shift enable signal SE=0, the counter logic in the address register is selected, and the address register has the same function of a counter, the test chip entries either the sequential test mode if the clock signal is running, or the diagnostic test mode if the clock signal is stopped.

In the sequential test mode, each time the edge of the clock signal is changed, the address is transformed to the next address (address+1), and the corresponding DUT is tested by the test apparatus; as the clock pulse keeps running, all DUTs will be successively tested by the test apparatus. In the diagnostic test mode, the clock signal is stopped, thus the selected DUT will not be changed, the selected DUT can be diagnosed by adjusting the voltages of its terminals, e. g. plot the Id-Vg curve of a transistor DUT, by changing the voltage on gate terminal; if the other DUTs need to be tested, reconfigured the address to select a DUT to test every time.

The addressable test chip test system according to some embodiments executes address configuration mode as follows:

-   i. A1, power on the test system; -   ii. A2, configure the SMUs and the function generator; -   iii. A3, set the reset signal RST=1 and maintain more than 100 µs,     then turn the reset signal RST=0; -   iv. A4, set the shift enable signal SE=1, the test chip entries the     address configuration mode; -   v. A5, the variable i is assigned to the address data bit N, the     shift data input signal SI is assigned to the i-th of the address     data bit; -   vi. A6, maintain more than 10 us; -   vii. A7, the function generator produces a complete pulse; -   viii. A8, the variable i is assigned to i-1; if i=0, end the address     configuration, otherwise, go back to step A5.

After the address configuration is complete, take DUTs being transistors as an example, the addressable test chip test system executes sequential test mode as follows:

-   i. B1, configure the SMUs and the function generator; -   ii. B2, set the address range of the DUTs from StartAddr to EndAddr,     the number of the DUT is N, M measurement items need to be tested     for each DUT, and each measurement items corresponds to a different     voltage/current combination of the signal line ports connected to     DUTs (in some embodiments, a transistor is connected to signal lines     GF, GL, DF, DL, SF, SL, BF); -   iii. B3, each measurement items of the M measurement items is     labeled as Mi (i is an integer from 1 to M), execute steps from B5     to B11; -   iv. B4 set the address data as StarAddr; -   v. B5, execute steps from A4 to A8, complete the address     configuration for sequential test mode; -   vi. B6, set SE=0; -   vii. B7, set the function generator to produce a continuous pulse     (square wave), and set a needed frequency and set the number of     pulses as N; -   viii. B8, start function generator, during each pulse time, the     addressable test chip completes an address transformation, the test     SMU will complete a test, and the test results are stored into test     SMUs momentarily; -   ix. B9, every SamplePerFetch pulses, reads the test results from     test SMU, fetches and stores the data into the database; -   x. B10, finish the test until all the N pulses are generated, and     all the test results are stored in the database.

Wherein, StartADDR, EndADDR and SamplePerFetch are integers, and EndADD≥ StartADDR; in some embodiments, the DUT is a MOS transistor, GF, GL, DF, DL, SF, SL, BF are signal lines connected to the ports of DUT, and GF, GL, DF, DL, SF, SL, BF pads are test pads. GF and GL pads are pads connected to the gate end of DUT, DF and DL pads are pads connected to the drain end of DUT, SF and SL are pads connected to the source end of DUT, and BF pad is a pad connected to the substrate end of DUT.

After the address configuration is complete, the addressable test chip test system executes diagnostic test mode as follows:

-   i. C1, configure the SMUs and the function generator; -   ii. C2, set the address, named Addr, of the DUT to be diagnosed; -   iii. C3, set the address data as Addr; -   iv. C4, execute steps from A4 to A8, complete the address     configuration; -   v. C5, set SE=0; -   vi. C6, adjust the voltages/current on test pads, and measure     accordingly for diagnosis; -   vii. C7, go back to step C3 if another DUT needs to be diagnosed.

According to the above introduction, common address register supports two addressing modes, including configuration mode and binary mode. The configuration mode transfers any desired address to addressing circuit, but only one address at a time. The binary mode adds 1 to the address incrementally, which is also the core of fast measurement.

The new type of address register supports at least four addressing modes, including configuration mode, binary mode, gray mode and selective mode. The configuration mode is as follows: the first edge-triggered flip-flop registers receives desired address, and the address signal is outputted to addressing circuit through ADDR and GB of the address register; after completing the test for this address, the test stops until a new address is entered into the address register.

The binary mode can be as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, and the address signal is outputted to addressing circuit through ADDR and GB of the address register; meanwhile, the first counter logic processes the current address to next address (address+1), and each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexer.

The gray mode can be as follows: the first edge-triggered flip-flop registers receives current address signal in gray code format, and the address signal is outputted to addressing circuit through ADDR and GB of the address register; meanwhile, the gray decoder converts the current address form gray to binary, then the second counter logic processes the current address to next address (address+1), finally the gray encoder converts the next address from binary to gray, and each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexer.

The selective mode can be as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the address signal is outputted to addressing circuit through ADDR and GB of the address register; meanwhile, the third edge-triggered flip-flop registers receives auxiliary data as selection table, the information in the selection table is about address area whether region to be addressed, according to this information the current address is confirmed whether to belong to the address area region to be addressed; if the current address belongs to the address area region to be addressed, the current address is processed to next address (address+1), and each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexer; if the current address belongs to the address area that does not required addressing, then skips this address area, the next address is the starting address of the next address area region to be addressed, and each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexer.

For the new type of address register, the shift enable signal SE controls the first multiplexer, the mode control signal received from the second edge-triggered flip-flop registers controls the second multiplexer, and the signals choose the addressable test chip to work in configuration mode, binary mode, gray mode or selective mode.

In some embodiments, the address register is integrated in a common addressable test chip, which constitutes a new type of addressable test chip. The input end of the address register connected to address register pads in the test chip; the output end of the addressing circuit connected to the first port of the switching circuit, the second and third port of the switching circuit connected to DUTs and test pads through signal lines.

The address register outputs address signals, which are decoded by the addressing circuit as address select signals, and such address select signals control switching circuit to select DUT to be tested. For the common addressable test chip, the inputs end of addressing circuit are connected to the address pads; if the number of DUT is N, this means that N address select signals are required; according to the principle of digital circuit, log₂N address signals are required to generate N address select signals, therefore, log₂N address signal pads are also required. As the development of the IC in high integration degree and high manufacturing area utilization ratio, more and higher density DUTs are fabricated in one test chip, but more DUTs means more address signal pads, the area of a pad is much bigger that a DUT in test chip, more address signal pads must limit the number of DUT. Integrating a new type of address register provided by the disclosure into the common addressable test chip only requires at least four address register pads (SE, SI, RST, CLK) to replace the log₂N address signal pads, this method greatly reduces the area of the pad in the addressable test chip and expands the capacity of the DUT. In some embodiments, 10⁶ DUTs can be accommodated in 10 mm² area.

The addressable test chip test system according to some embodiments includes a test apparatus, a probe card, and an addressable test chip integrated with the new type of address register: at least one source measurement unit (SMU) connected to the power pads VDD and VSS through the probe card, to provide power for the test chip; at least one SMU connected to the switch matrix module, and the switch matrix module connected to the input pads SE and SI of the address register through the probe card; at least one SMU connected to the RST pad of the address register in the test chip through the probe card; the function generator connected to the pad CLK of the multipurpose register through the probe card; at least two SMUs are test SMUs, and these test SMUs connected to the test pads (which are connected to DUTs′ ports through switch circuit) in the addressable test chip through the probe card, so as to provide voltage and realize data test for the test chip; the function generator also connected to the test SMU; the database in the test apparatus is configured to store the test results.

In some embodiments, the address register is integrated in the probe card, and the addressable test chip test system includes a test apparatus, an addressable test chip and a probe card integrated with the new type of address register: at least one SMU connected to the power pads VDD and VSS through the probe card, to provide power for the addressable test chip; at least one SMU connected to the switch matrix module, and the switch matrix module connected to the input pads SE and SI of the address register in the probe card; the output of the address signal from the address register connected to the address signal pads of the addressable test chip; at least one SMU connected to the address register through the reset signal RST; the function generator connected to the address register through the clock signal CLK; at least two test SMU are test SMUs, and these test SMUs connected to the test pads (these test pads are connected to DUTs′ ports by switch circuit) of the test chip through the probe card; the function generator also connected to the test SMU; the database in the test apparatus is configured to store the test results.

The address register integrated into addressable test chips or integrated into the probe card has its advantages and disadvantages. (1) As mentioned before, integrating the address register into addressable test chip, only several address register pads can be configured to replace many address pads in the common addressable test chip, which can greatly reduce the occupied area of the pad in the addressable test chip, high-density test chips with device density >1000/mm² can be designed and fabricated, but the performance of address register will be affected by IC manufacturing process because of the address register is fabricated with test chip through the IC manufacturing process. (2) Integrating the address register into a probe card and using a addressable test chip without the address register in the test system, although the DUT density of common addressable test chip less than 1000/mm2, this method is very convenient because the simple design and mature manufacturing process of probe card, the performance of the address register is stable, and the probe card can be reused to realize the recycling of resources.

Compared with common addressable test chip test system, the addressable test chip test system disclosed in the disclosure: (1) the test system provides with two test modes result of including a new type of address register, user can select the diagnostic test mode and the sequential test mode according to the requirement; especially for sequential test mode, the function generator and the address register work together to generate continuous address signals can test all DUTs continuously and quickly, this test mode does not need user write test plan, and does not need the test apparatus to configure an address for each DUT every time, it can improve the test efficiency effectively; the new type of address register supports at least four addressing modes, including configuration mode, binary mode, gray mode and selective mode, which extends the method of addressable testing; (2) the test system provides a quickly tested method: the function generator generates clock pulse signals to stimulate the address register to select one or more DUTs to be tested, at the same time, the clock pulse signal is output into the test SMUs in the test apparatus to trigger the test apparatus to enter test state; therefore, the test apparatus will test the selected DUT immediately when the DUT is selected to improve the test speed significantly; (3) when the new type of address register is integrated into common addressable test chip, the new type addressable test chip has high density DUTs and the number of DUT can reach to > 1000/mm²; (4) All DUTs are connected to four ends through signal lines to improve the test accuracy; 5) Multi-stage transmission gate structure is used as switching circuit in the addressable test chip and can decease the background leakage current of the unselected DUTs, therefore, electrical parameters of the selected DUT can be tested with more accuracy; 6) the test system provides a new type of addressable test chip configured with a forcing circuit and a sensing circuit, more accurate resistance can be obtained through forcing a low current into the sensing circuit; 7) the test system provides a design method of peripheral circuit in a test chip with considering co-design of “DUTs” and “peripheral circuits”, the design method can simplifies the wiring layout, reduce the number of metal layers, and make the sum of length of the wiring for connecting the DUTs and the corresponding peripheral circuit units to achieve the shortest; 8) the test system provides test method of Implementing ultra-high speed testing through hardware triggering combined with continuous sampling by SMU, Only software and hardware communication, hardware initialization, and other steps are carried out at the beginning of testing, while the testing process is completely controlled by the hardware itself, achieving a significant improvement in testing efficiency. Combined with data analysis, test data alignment is achieved, while avoiding issues such as test data misalignment, effectively improving test data stability and optimizing the reliability of test results.

In some embodiments, the addressable test chip test system includes an address register that is integrated in the probe card. The connect relationships of the addressable test chip test system is as follows: at least one SMU is connected to the power pads through the probe card, to provide power for the addressable test chip; at least one SMU is connected to the switch matrix module, and the switch matrix module is connected to the input pads SE and SI of the address register in the probe card; the output of the address signal from the address register is connected to the address signal pads of the addressable test chip; at least one SMU is connected to the address register through the reset signal RST; the function generator is connected to the address register through the clock signal CLK; at least two SMUs are test SMUs, and these test SMUs are connected to the test pads of the test chip through the probe card; the function generator is also connected to the test SMUs; the database in the test apparatus is configured to store the test results.

In some embodiments, the addressable test chip test system includes an address register that is integrated in the addressable test chip and constitutes a new type of addressable test chip: the input end of the address register is connected to address register pads in the test chip; the output end of the addressing circuit is connected to the first port of the switching circuit, the second and third port of the switching circuit is connected to DUTs and test pads through signal lines; the address register outputs address signals which are decoded by the addressing circuit as address select signals, and these address select signals control a switching circuit to select the DUT to be tested.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a circuit structure of the address register according to some embodiments.

FIG. 2 illustrates another circuit structure of the address register according to some embodiments.

FIG. 3A illustrates a type of addressable test chip without address register.

FIG. 3B illustrates a type of addressable test chip integrated with address register.

FIG. 3C illustrates a type of addressable test chip integrated with an address register and a sensing circuit.

FIG. 4A illustrates a type of addressable test chip without address register.

FIG. 4B illustrates a type of addressable test chip integrated with address register.

FIG. 4C illustrates a type of addressable test chip integrated with an address register and a sensing circuit.

FIG. 5A illustrates a type of addressable test chip without address register.

FIG. 5B illustrates a type of addressable test chip integrated with address register.

FIG. 6A illustrates a common addressable test chip without address register.

FIG. 6B illustrates a common addressable test chip integrated with address register.

FIG. 7 illustrates an array structure of the type addressable test chip of FIG. 3B according to some embodiments.

FIG. 8 illustrates an addressable test chip test system according to some embodiments.

FIG. 9 illustrates the test method of the addressable test chip test system of FIG. 8 according to some embodiments.

FIG. 10 illustrates an addressable test chip test system according to some embodiments.

FIG. 11 illustrates the structure of one-stage transmission gate according to some embodiments.

FIG. 12 illustrates the structure of two-stage transmission gate according to some embodiments.

FIG. 13 illustrates the structure of three-stage transmission gate according to some embodiments.

FIG. 14 illustrates the structure of one-stage transmission gate structures configured with decoders.

FIG. 15 illustrates the structure of three-stage transmission gate structures configured with decoders.

FIG. 16 illustrates a type of addressable test chip equipped with a sensing circuit.

FIG. 17 illustrates a type of addressable test chip equipped with a sensing circuit.

FIG. 18A illustrates a type of forcing circuit connected to a voltage source via a pad.

FIG. 18B illustrates a type of sensing circuit connected to a current source via a pad.

FIG. 19A illustrates a circuit structure of the address register according to some embodiments.

FIG. 19B illustrates a schematic of the “next address calculation” in FIG. 19A.

FIG. 19C illustrates a schematic diagram of the 32-bit register according to some embodiments.

FIG. 20 illustrates a layout diagram of DUTs and the peripheral circuit ideally and the partial enlarged diagram of A.

FIG. 21 illustrates a layout diagram of DUTs and the peripheral circuit practically.

FIG. 22 illustrates a layout diagram of the peripheral circuit units for a one-dimensional DUT array meeting the conditions.

FIG. 23 illustrates a layout diagram of the peripheral circuit units for a two-dimensional DUT array meeting the conditions.

FIG. 24 illustrates a first layout diagram of the peripheral circuit units for a one-dimensional DUT array that do not meeting the conditions.

FIG. 25 illustrates a second layout diagram of the peripheral circuit units for a one-dimensional DUT array that do not meeting the conditions.

FIG. 26 illustrates a first layout diagram of the peripheral circuit units for a two-dimensional DUT array that do not meet the conditions.

FIG. 27 illustrates a second layout diagram of the peripheral circuit units for a two-dimensional DUT array that do not meet the conditions.

FIG. 28 illustrates an optimized layout diagram of the peripheral circuit units in FIG. 26 .

FIG. 29 illustrates a layout diagram of the peripheral circuit units for a one-dimensional DUT array with increasing one row.

FIG. 30 illustrates a layout diagram of the peripheral circuit units for a two-dimensional DUT array with increasing one row.

FIG. 31 illustrates an optimized layout diagram of the peripheral circuit units in FIG. 2 .

FIG. 32 illustrates a first schematic diagram of selecting DUTs among a plurality of devices.

FIG. 33 illustrates a second schematic diagram of selecting DUTs among a plurality of devices.

FIG. 34 illustrates a schematic diagram of ultra-high-speed measurement.

FIG. 35 illustrates a schematic diagram of another integrated testing algorithm for ultra-high-speed measurement.

FIG. 36 illustrates a schematic diagram of signal timing triggering at CLK/DF end.

FIG. 37 illustrates a hardware setting diagram.

FIG. 38 illustrates a schematic diagram of relevant signal input and hardware measurement behavior.

FIG. 39 illustrates a schematic diagram of each signal frequency and sampling situation.

FIG. 40 illustrates a schematic diagram of data processing results.

FIG. 41 illustrates a schematic diagram of the testing system.

DETAILED DESCRIPTION

With the shrinking of integrated circuit (IC) manufacture process, the number of transistors in single chip is increasing, the yield of advanced IC technology is also facing many challenges. In the background of manufacturability, test chip is configured to monitor and improve the yield of IC manufacture effectively. Traditional short-range test chip, each port of the being tested DUT (device under test) individually connect to the probe pin (PAD). PADs occupy large area in wafer; therefore, the number of PAD is limited, resulting in the number of DUTs can be measured is limited, and low rate area utilization of test chip. As such, test chips designed by this method are unable to meet the needs of device statistical modeling.

An addressing circuit can be configured to test numerous devices because of the advantage of sharing PADs in testing, engineers integrated it into test chip design to test more devices. As shown in FIG. 5A, ordinary addressable test chip includes a plurality of PADs (labeled as “P,” “A,” “T” in the drawings), addressing circuit, switching circuit and DUTs. The addressing circuit connects to address signal pads (labeled as “A” in the drawings) and obtains address signal through the address signal pads, the addressing circuit also connects to switching circuit and outputs address select signals to control switches of the switching circuit in on-state or off-state; the switching circuit connects to DUTs and selects a single DUT to be tested through the switch state; the addressing circuit also connects to power pads (labeled as “P” in the drawings) and the power pads supply power for the whole test chip, the switching circuit also connects to test pads (labeled as “T” in the drawings) and the test pads supply test points for the whole test chip.

Various embodiments of the present disclosure will be further described in conjunction with the drawings and specific embodiments, but the scope of protection of the present disclosure is not limited thereto.

Example 1

An addressable test chip test system includes a test apparatus, a probe card and an addressable test chip, the test apparatus connects to the addressable test chip through the probe card to constitute a test path, the above addressable test chip is an addressable test chip configured with an address register.

The address register can implement the function as a counter or a shifter through changing its external signal. As shown in FIG. 1 , the address register includes a plurality of edge-triggered flip-flop registers, a counter logic, a shifter logic and a multiplexer; the input ports include a reset signal RST, a clock signal CLK, a shift enable signal SE, a shift data input signal SI, the output ports include a scan data output signal SO and several address signals ADDR.

The internal connection of the address register is as follows: the input D of edge-triggered flip-flop registers connected to the data output of the multiplexer, the input R of edge-triggered flip-flop registers s connected to RST of address register, the input CK of edge-triggered flip-flop registers connected to CLK of address register, the output Q of edge-triggered flip-flop registers connected to ADDR of address register, the input of the counter logic is connected to ADDR of address register; the input of the shifter logic connected to ADDR and SI; the input of the multiplexer connected to SE, the output of the counter logic and the shifter logic. The shift enable signal SE controls multiplexer, the signal chooses one device to work between the counter logic and the shifter logic.

When SE=1, the shifter logic is selected, each time the edge of the clock signal is changed, the address signal shifts 1 bit to right, the lowest bit is discarded, the highest bit is changed to SI; any address signal can be inputted from the outside through this mode.

When SE=0, the counter logic is selected, if the signal clock signal (CLK) is running, each time the edge of the clock signal is changed, the address signal ADDR can be changed to ADDR+1,the address signal can realize increase in sequence through this mode; if clock signal is stopped, the address signal ADDR is unchanged, and the address signal can be changed through the above mode of SE=1.

The scan data output signal (SO) is configured to check whether DUT is the one we want to test when the address register is integrated into the addressable test chip test system, in some embodiments, the SO output port can be omitted, as shown in FIG. 2 .

In some embodiments, the address register can be configured with two or more counter logics and two or more shifter logics, in case of one counter logic or shifter logic does not work to affect the whole chip.

For addressable test chips, there are three most common layout structures, as shown in FIG. 3A, FIG. 4A, FIG. 5A. All the DUTs in FIG. 3A are divided into a plurality of DUT arrays, each array configured with a set of switching circuit and addressing circuit; the type of test chip is suitable for numerous DUTs and precision requirements is not very high. In FIG. 4A, all DUTs of the addressable test chip share a set of switching circuits and addressing circuits; this type test chip is suitable for numerous DUTs and precision requirements is not very high, unlike the type test chip shown in FIG. 3A, this type test chip can be applied into the actual product layout, and the key components can be tested without modifying the actual product layout. As shown in FIG. 4A, the “switching circuit” is labeled as “S,” the “addressing circuit” is labeled as “A,” the “Address Register” is labeled as “R”; all DUTs are divided into a plurality of DUT blocks, and all blocks are similar to “series” arrangement, the number of DUT in each block is small; moreover, each block is configured with a set of switching circuit and an addressing circuit; this type of test chip is suitable for small number of DUTs, it occupies small area and can be placed in the scribe line of wafer.

In the embodiment, the address register is configured into common addressable test chip. FIG. 3B, FIG. 4B, and FIG. 5B are layout structures of three types of addressable test chips configured with address registers.

All types of common addressable test chip can be expressed in FIG. 6A. “Power pads” is labeled as “P” in the drawings, “address signal pads” is labeled as “A,” “Test pads” is labeled as “T.” In this embodiment, the address register configured in a common addressable test chip can be expressed in FIG. 6B. The input end of the address register connected to the address register pad (is labeled as “R” in the drawings) of the test chip, the output address signal end of the address register connected to the input end of the addressing circuit, the output of the addressing circuit connected to the first port of the switching circuit, the second and third port of the switching circuit connected to DUTs and test pads (is labeled as “T” in drawings) through signal lines. The address register outputs address signals, these address signals are decoded by the addressing circuit as address select signals, and such address select signals control switching circuit to select DUT to be tested.

The address signal of common addressable test chip is inputted to addressing circuit through address signal pads (labeled as “A” in FIG. 6A), these address signals are decoded by the addressing circuit as address select signals to control switching circuit to select DUT to be tested, the number of DUT is equal to the number of address select signals, so that, the number of the address signals and the number of address signal pads are determined by the number of address select signals or the number of DUT. For example, there are 128 DUTs, then 128 address select signals are needed. According to the principle of digital signal, 128 address select signals can be generated by 7 (log2128=7) address signals, which means that the number of address signal pads is 7.

As the development of the IC in high integration degree and high manufacturing area utilization ratio, the test chip faced many demands, much higher density DUTs needed to improve the failure detection rate and save the cost of manufacturing area. But more DUTs means more address signal pads, the area of a pad is much bigger that a DUT in test chip, more address signal pads must limit the number of DUT. To solve this problem, in this embodiment, an address register is integrated into a common addressable test chip to constitute a new type of addressable test chip, only a few of the address register pads can instead of many address signal pads which will increased as the number of DUT grows, this type of addressable test chip can greatly improve the area utilization of the test chip, it can accommodate about 10⁶ orders of magnitude DUTs in 10 mm² area.

In the embodiment, the DUT is transistor, and four-terminal measuring techniques can be employed to test the transistor. The layout of the addressable test chip in this embodiment is shown in FIG. 3B and FIG. 7 . The test chip includes an address register, several addressing circuits, several switching circuit, a plurality of transistors (DUTs) and a plurality of pads. The test chip occupies an area of 10 mm², all the transistors are divided into 64 (8×8) arrays, each array contains 16,384 (128×128) transistors. This means that, 1,048,576 (8×8×128×128) transistors can be accommodated in the area of 10 mm². Each array is configured with a set of addressing circuit and switching circuit; the addressing circuit includes an array selector, a row decoder and a column decoder. In some embodiments, the buffers are configured to the row and column decoder to solve the problem of too long metal wiring connection and signal integrity.

In this embodiment, the transistors in test chip are divided into 64 (2⁶) arrays, each array contains 16,384 (2⁷×2⁷) transistors, so that, 20-bit address signals need to be output by the address register. The 6 bit address signals are configured to generate 2⁶ array select signals to control one or more arrays in a state of preparing to be test; 7 bit address signals are configured to control row decoder to generates 2⁷ row address select signals; 7 bit address signals are configured to control column decoder to generates 2⁷ column address select signals; therefore, a single DUT can be selected to be tested in each array which is selected by array select signals.

As shown in FIG. 7 , the switching circuit includes a plurality of transmission gates. In each array, the B, S and G ends of transistors in a row are connected respectively to the B, S, G end signal lines which controlled by the row addressing circuit, and the D end of transistors in a column are connected to the D end signal line which is controlled by the column addressing circuit. Specifically, the B end of the transistors in a row are connected to the signal line BF through a transmission gate, the S end of the transistors in a row are connected to the signal line SF through a transmission gate, the G end of the transistors in a row are connected to the signal line GF and GL through a transmission gate respectively, the D end of the transistors in a column are connected to the signal line DF and DL through a transmission gate respectively. The transmission gates at the BF, SF, GF and GL ends are controlled by the address select signal which generated by the row addressing decoder, and the transmission gates at the DF and DL ends are controlled by the address select signal which is generated by the column addressing decoder.

Fourteen pads are needed in the test chip, which includes: the power pads VDD and VSS; input signal pads of address register RST, SE, SI, AEN and CLK; output signal pad of address register SO, and the test pads BF, SF, GF, GL, DF and DL. In all test pads, DF or DL end is output end of test data, when several arrays are tested at the same time (parallel testing), therefore, several pair of DF and DL pads are needed. In some embodiments, all DUTs are not divided into several arrays and the array select signals is not needed, so that, there is no AEN pads, and the number of pads is 13. The output address register signal (SO) is the lowest position of the address signal which is used for check whether DUT is the one we want to test. In some embodiments, there is no scan data output signal pad SO, and the number of pads is 13. In some embodiments, there are no AEN and SO signals, and the number of pads is 12.

In this embodiment, the test apparatus of the test system includes a function generator (labeled as “FGen” in FIG. 8 ), switch matrix module (labeled as “SWM” in FIG. 8 ), at least six source measurement units (SMUs), a database and an online analysis engine. Therefore, the test apparatus, the prober card and the addressable test chip integrated with address register can constitute the test system of the embodiment, as shown in FIG. 8 .

In FIG. 8 , “power pads” is labeled as “P,” “address register pads” is labeled as “R,” “test pads” is labeled as “T.” The first source measurement unit (SMU) is connected to the power pads VDD and VSS in the addressable test chip through the probe card, the first SMU provides power to the test chip; the second SMU is connected to the switch matrix module, the switch matrix module is connected to the input pads SE, SI and output pad SO of the address register through the probe card; the third SMU is connected to the input pads RST of the address register in the test chip through the probe card; the function generator is connected to the input pads CLK of the address register through the probe card; the fourth, fifth and sixth SMU are test SMUs, and the test SMUs are connected to the test pad DF, DL, GF, GL, SF, SL and BF through the probe card, so as to provide voltage and realize data test for the test chip; the function generator is also connected to test SMUs; the database in the test apparatus is configured to store data, the online analysis engine is configured to analyze the data. In some examples, the online analysis engine is excluded in the equipment, the data can be output and analyzed by external module. In some examples, the database is not an independent structure but integrated in other device, such as some type of SMUs that have the functions to store data.

Before the test system is tested, the test apparatus is configured to connect with the probe card; in response to the test requirement, the test apparatus controls the probe card to connect with the addressable test chip; the first SMU provides power for addressable test chip; the function generator generates a clock pulse signal, the clock pulse signal stimulates the address register in addressable test chip to generate address signals, the address signal is decoded to address select signals through addressing circuit, the address select signal controls the switching circuit to select DUT to be tested at the same time, the clock pulse signal generated by the function generator is fed back into the test SMU of the test apparatus to trigger the test apparatus to enter the test state; therefore, the test apparatus will test the selected DUT immediately when the DUT is selected.

Based on the function of address register, when the shift enable signal SE=1, the shifter logic in the address register is selected, and the address register has the same function as a shift register, the test chip entries the address configuration mode: each time the edge of the clock signal is changed, the address register 1) shifts all address bits right 1 bit, 2) reads the shift data input SI into the highest address bit, and 3) the lowest address bit is discarded. After all address bits have been shifted in, the address register is configured to the desired address. When the shift enable signal SE=0, the counter logic in the address register is selected, and the address register has the same function as a counter, the test chip entries either the sequential test mode if the clock signal is running, or the diagnostic test mode if the clock signal is stopped.

In the sequential test mode, each time the edge of the clock signal is changed, the address is transformed to the next address (address+1), and the corresponding DUT is tested by the test apparatus; as the clock pulse keeps running, all DUTs will be successively tested by the test apparatus. In the diagnostic test mode, the clock signal is stopped, thus the selected DUT will not be changed, the selected DUT can be diagnosed by adjusting the voltages of its terminals, e. g. plot the Id-Vg curve of a transistor DUT, by changing the voltage on gate terminal; if the other DUTs need to be tested, reconfigure the address to select a DUT to test every time.

In some embodiments, the clock pulse signal generated by the function generator is not output into the test SMU directly, but though a buffer to output into the test SMU, the buffer can be configured to test apparatus or probe card. The input of the buffer is connected to the output of the function generator, the output terminal of the buffer is connected to the test SMU. When the test requirements occur, the function generator generates a clock pulse signal; the clock pulse signal stimulates the address register in addressable test chip to generate address signals, the address signal are decoded to address select signals through addressing circuit, the address select signal control switching circuit to select DUT to be tested, at the same time, the clock pulse signal is input to the buffer, the buffer fed back the clock pulse signal to the test SMU in the test apparatus to trigger the test apparatus to enter the test state. The added buffer is configured to solve the time difference between selecting DUT and triggering the test apparatus to enter the test state.

In some examples, more/less than six source measurement units are configured in the test apparatus due to the different type of DUT and circuit design. Sometimes, more SMUs is configured to keep the circuit more stable, two or more SMU are required to supply power; sometimes, or when the parallel testing is needed, therefore, more pair of DF and DL pads are needed, and more SMUs is needed to connect to DF and DL pads. As shown in FIG. 8 , for example, there are N DUTs needed to be tested at the same time, the addressable test chip should be configured with N pair of pads, and the number of the fourth SMU should configure N for the test apparatus; in other words, the number of the fourth SMU is same to the number of DUT of parallel testing.

In common test systems, (1) the test state is triggered after testing the DUT is selected; (2) common test system adopts SMU to generate address signal directly, a DUT needs to be selected and test each time, engineer needs to adjust or write test plan to adjust SMU to generate a needed address signal, and the test apparatus needs to configure an address for each DUT every time, for numerous DUTs, it is a complicated and tedious work, and the test efficiency is very low.

In the test system, the function generator is connected to the address register and the test SMU, this connection type can provide a new test method: the selection of DUT in the test chip and enable the test apparatus into test state are completed at the same time, and the test efficiency has been greatly improved. The test method is shown in FIG. 9 , after initializing and configuring the test apparatus, the function generator generates a clock pulse signal, the clock pulse signal stimulates the address register in addressable test chip to generate address signals, the address signals are decoded to address select signals through addressing circuit, the address select signal control switching circuit to select DUT to be tested, at the same time, the clock pulse signal generated by the function generator is fed back into the test SMU of the test apparatus to trigger the test apparatus to enter the test state; therefore, the test apparatus will test the selected DUT immediately when the DUT is selected. All test data is stored into the test SMUs momentarily, when all the tests are completed, the test algorithm (test algo) will control the database to fetch all test results, the online analysis engine will analyze all test results and store them into a database.

Moreover, in the test system of the disclosure, the address register can implement the logic function of the counter and the shifter. Continuous address signals can be generated when the counter logic is used, the devices can be quickly tested by the test system without reading test plan and adjusting the SMU.

Example 2

An addressable test chip test system includes a test apparatus, a probe card and an addressable test chip, the test apparatus connects to the addressable test chip through the probe card to constitute a test path. An address register is integrated in the probe card, the address register is a new type of address register in EXAMPLE 1. The test apparatus of this embodiment is the same as the test apparatus in EXAMPLE 1, the addressable test chip in this embodiment is a common addressable test chip as shown in FIG. 5A.

In the test system, the first SMU in the test apparatus connected to the probe card, the probe card connected to the addressable test chip through the power pads (labeled as “P” in FIG. 9 ) VDD and VSS; the second SMU connected to the switch matrix module (labeled as “SWM” in FIG. 8 ), and the switch matrix module connected to the address register through the shift enable signal SE, the shift data input signal SI and the scan data output signal SO, the address register connected to address signal pads in the addressable test chip; the third SMU connected to the address register through the reset signal RST; the function generator connected to the address register through the clock signal CLK; the fourth, fifth and sixth SMU are test SMUs, and these test SMUs connected to the test pad DF, DL, GF, GL, SF, SL, BF through the probe card; the function generator also connected to the test SMU in the equipment; the online analysis engine and the database connected to the test SMU, and the online analysis engine is configured to analyze test results, the database is configured to store data.

In some examples, the online analysis engine is excluded in the equipment, the data can be output and analyzed by external module. In some examples, the database is not an independent structure, but can be integrated in other device, such as some type of SMUs that have the functions to store data.

Before the test system is tested, the test apparatus is configured to connect with the probe card; in response to the test requirement, the test apparatus controls the probe card to connect with the addressable test chip; the first SMU provides power for addressable test chip; the function generator generates a clock pulse signal, the clock pulse signal stimulates the address register in addressable test chip to generate address signals, the address signals are decoded to address select signals through addressing circuit, the address select signal control switching circuit to select DUT to be tested, at the same time, the clock pulse signal generated by the function generator is fed back into the test SMU of the test apparatus to trigger the test apparatus to enter the test state; therefore, the test apparatus will test the selected DUT immediately when the DUT is selected.

Based on the function of address register, when SE=1, the shifter logic in the address register is selected, and the address register has the same function of a shift register, the test chip entries the address configuration mode: each time the edge of the clock signal is changed, the address register reads an address data from the shift data input signal SI, and the selected DUT will be tested by the test apparatus, when the DUT test is completed, the test system will read the test plan and according to the next address data will select the next DUT to be tested; when SE=0, the counter logic in the address register is selected, and the address register has the same function of a counter, the test chip entries the sequential test mode: each time the edge of the clock signal is changed, the address bit is transformed to the next address bit, all DUTs will be successively and fast tested by the test apparatus from the first DUT to the last DUT without reading the test plan.

In some embodiments, the clock pulse signal generated by the function generator is not output into the test SMU directly, but though a buffer to output into the test SMU, the buffer can be configured to test apparatus or a probe card. The input of the buffer is connected to the output of the function generator, the output terminal of the buffer is connected to the test SMU.

When the test requirements occur, the function generator generates a clock pulse signal; the clock pulse signal stimulates the address register in addressable test chip to generate address signals, the address signals are decoded to address select signals through addressing circuit, the address select signal control switching circuit to select DUT to be tested, at the same time, the clock pulse signal is input to the buffer, the buffer fed back the clock pulse signal to the test SMU in the test apparatus to trigger the test apparatus to enter the test state. The added buffer is configured to solve the time difference between selecting DUT and triggering the test apparatus to enter the test state.

In some examples, more/less than six source measurement units are configured in the test apparatus due to the different types of DUTs and circuit designs. Sometimes, more SMUs is configured to keep the circuit more stable, two or more SMU are required to supply power; sometimes, or when the parallel testing is needed, therefore, more pair of DF and DL pads are needed, and more SMUs is needed to connect to DF and DL pads. As shown in FIG. 8 , for example, there is N DUTs needed to be tested at the same time, the addressable test chip should be configured with N pair of pads, and the number of the fourth SMU should configure N for the test apparatus; in other words, the number of the fourth SMU is same to the number of DUT of parallel testing.

The test method is the same to EXAMPLE 1. The differences with EXAMPLE 1 can include, integrating the address register into a probe card not into a common addressable test chip, although the DUT density of common addressable test chip is less than 1000/mm2. This method is very convenient because of the simple design and mature manufacturing process of probe card, the performance of the address register is stable, and the probe card can be reused to realize the recycling of resources.

Example 3

An addressable test chip includes at least one switching circuit, at least one addressing circuit, a plurality of DUTs and a plurality of pads; the DUTs can be divided into one or more DUT arrays, where a pair of addressing circuit and switching circuit are configured to each DUT array; the switching circuit is a multi-stage transmission gate circuit comprising multiple transmission gate structures.

For the switching circuit, each stage of the circuit includes at least one transmission gate structure; each transmission gate structure includes at least one transmission gate; the output end of each high-level transmission gate can be connected to low-level transmission gate(s)′ input ends of a low-level transmission gate structure, the output ends of the lowest level transmission gates can be coupled to terminals of DUTs.

In some embodiments, the input ends of the highest-level transmission gate connected to test pads; the input end of each transmission gate also connected to the decoder in the addressing circuit.

In some embodiments, for multi-stage transmission gate structures, each same-level transmission gate connected to the same number of low-level transmission gates to ensure the same test accuracy of each DUT.

In some embodiments, the input ends of the same-level transmission gates are connected with the same decoder.

Common switching circuit is a one-stage transmission gate circuit, as shown in FIG. 11 , in this example, the number of DUT is 1024, therefore, for one test signal line (in the example, take DF test signal line as an example), 1024 transmission gates are configured to one terminal (Drain terminal) of the DUTs respectively, the input ends of these transmission gates connected to a test pad through DF signal line, and the input ends of these transmission gates also connected decoder of addressing circuit in the addressable test chip. As shown in FIG. 14 , the input of the decoder is 10 bits, the output is 1024 bits, and the 1024 outputs of the decoder are connected to the 1024 transmission gates.

The switching circuit is a two-stage transmission gate circuit which composed by transmission gate structures, as shown in FIG. 12 . For 1024 DUTs, in the example, take DF test signal line as an example, the switching circuit includes one first-stage transmission gate structure and 32 last-stage transmission gate structures; each first-stage transmission gate structure includes 32 first-stage transmission gates, these 32 first-stage transmission gates are connected to DF test pad through signal lines; each last-stage transmission gate structure includes 32 last-stage transmission gates, these 32 last-stage transmission gates are connected to the same one of 32 first-stage transmission gates; the outputs of the last-stage transmission gates are connected to DUTs′ ports. Therefore, at least two decoders are needed to control transmission gates of the two-stage transmission gate circuit in on-state or off-state.

The switching circuit is composed by three-stage transmission gate circuit, as shown in FIG. 13 . Take DF test signal line as an example, for 1024 DUTs, the switching circuit includes 1 first-stage transmission gate structures, 8 second-stage transmission gate structures and 64 last-stage transmission gate structures, each first-stage transmission gate structure includes 8 transmission gates, these 8 first-stage transmission gates are connected to DF test pad through signal lines; each second-stage transmission gate structure includes 8 transmission gates, each last-stage transmission gate structure includes 16 transmission gates; the outputs of the last-stage transmission gate structures are connected to DUTs′ ports. Therefore, at least three decoders are needed to control transmission gates of the three-stage transmission gate circuit in on-state or off-state, as shown in FIG. 15 : a 3-8 decoder, a 6-64 decoder and a 10-1024 decoder connected to the input of the first-stage, second-stage and last-stage transmission gates respectively.

When a DUT is selected to test, the background leakage current (Ibg) of the unselected DUTs can be estimated using the following formula: for one-stage transmission gate circuit, Ibg = 1023 × Ioff; for two-stage transmission gate circuit, Ibg = 31 × Ioff + 31 × Ioff; for three-stage transmission gate circuit, Ibg =7 × Ioff + 7 × Ioff+ 15 × Ioff, wherein, Ioff is the background leakage current of one transmission gate. It can be seen that, using multi-stage transmission gate structure to replace common switch or single transmission gate can decrease the background leakage current and improve the test precision of electrical parameters.

In some embodiments, the multi-stage transmission gate structures also can be used with other addressable circuits, such as the new type of addressable test chip with address register.

The test chip using multi-stage transmission gate structures to replace common switch or single transmission gate can also be expressed by FIG. 6A and FIG. 6B, and the test chip can also be used as the disclosed test chip test system in the disclosure.

Example 4

The switching circuit as part of an addressable test chip, whether using common switches, transmission gates, or multi-stage transmission gate structures, the IR-drop of switching circuit cannot be ignored in some testing requirement, such as small resistance measurement. Especially for multi-stage transmission gate structures, more transmission gates may lead to larger IR-drop.

To decease the IR-drop in switching circuit, a new type of addressable test chip is disclosed in this example, a couple of forcing circuit and sensing circuit are configured to each DUT array in the addressable test chip. Common addressable test chip includes a plurality of pads, at least one addressing circuit, at least one switching circuit and DUTs; the DUTs can be divided into one or more DUT arrays, a couple of addressing circuit and switching circuit are configured to each DUT array; the addressing circuit includes a set of rows and columns addressing circuit; the switching circuit includes a set of rows and columns switching circuit. The new type of addressable test chip is configured with at least one addressing circuit and at least two switching circuits; defining a forcing circuit includes an addressing circuit and a switching circuit; defining a sensing circuit includes an addressing circuit and a switching circuit; a DUT array is configured with a couple of forcing circuit and sensing circuit; for a couple of forcing circuit and sensing circuit, one addressing circuit can be shared by the two circuits.

As shown in FIG. 3C and FIG. 4C, the new type of addressable test chip includes a plurality of pads, at least one forcing circuit, at least one sensing circuit and DUTs. The DUTs can be divided into one or more DUT arrays, a couple of forcing circuit and sensing circuit are configured to each DUT array; each forcing circuit includes a force addressing circuit and a force switching circuit, each sensing circuit includes a sense addressing circuit and a sense switching circuit; for each DUT array, the force addressing circuit and sense addressing circuit connect to address signal pads and obtain address signal through the address signal pads, and also connect to the force switching circuit and sense switching circuit respectively, and output address select signals to control switches of the force switching circuit and sense switching circuit in on-state or off-state; the force and sense switching circuits connect to DUTs and select the same DUT to be tested through the state of switches. The force addressing circuit and sense addressing circuit also connect to the power pads and the power pads supply power for the whole test chip, the force and sense switching circuits also connect to test pads and the test pads supply test points for the whole test chip.

In some examples, the forcing circuit and sensing circuit also can be configured in common addressable test chip and other kinds of addressable test chips to improve the accuracy of resistance measurements. In this example, as shown in FIG. 16 and FIG. 17 , the forcing circuit and sensing circuit are configured to a common addressable test chip without an address register, in the two drawings, the DUT in the addressable test chip is resistor.

For each DUT array, the force addressing circuit and sense addressing circuit connect to address signal pads and obtain address signal through the address signal pads, the two addressing circuits also respectively connect to the force switching circuit and sense switching circuit, and outputs address select signals to control switches of the force switching circuit and sense switching circuit in on-state or off-state; the force and sense switching circuits connect to DUTs and select a DUT to be tested through the switches’ state. The force and sense addressing circuits also connect to the power pads and the power pads supply power for the whole test chip, the force and sense switching circuits also connect to test pads and the test pads supply test points for the whole test chip.

A new type of addressable test chip also suitable for the test equipment and the test system are disclosed in this disclosure. The addressable test chip can be regarded as having at least one forcing circuit and at least one sense circuit, in some examples, the structure of forcing and sensing circuits are the same.

As shown in FIG. 18A and FIG. 18B, in the forcing circuit, the switching circuit (labeled as “TG” in FIG. 18A) connected to a voltage source via a pad, the voltage source supplies the desired voltage, due to IR-drop, the voltage on force line and the voltage source may be different; in the sensing circuit, the switching circuit (labeled as “TG” in FIG. 18B) connected to a current source via a pad, the current source supplies a small current, such as 10-12 A, the voltage sensed at the current source will be very close to the voltage on sense line because of very low current along the sense line, therefore, resistance of the selected DUT can be accurately measured.

In some examples, the sensing circuit also can be configured to common addressable test chip and other kinds of addressable test chips to improve the accuracy of resistance measurements.

Although specific embodiments have been described above in detail, the description is merely for purposes of illustration. It should be appreciated, therefore, that many aspects described above are not intended as required or essential elements unless explicitly stated otherwise. Various modifications of, and equivalent acts corresponding to, the disclosed aspects of the exemplary embodiments, in addition to those described above, can be made by a person of ordinary skill in the art, having the benefit of the present disclosure, without departing from the spirit and scope of the disclosure defined in the following claims, the scope of which is to be accorded the broadest interpretation so as to encompass such modifications and equivalent structures.

Example 5

The address register of example 1 supports configuration mode and binary mode; the configuration mode transfers any desired address to addressing circuit, but only tests for the desired address; the binary mode supports continuous testing, which can be realized by adding 1 to the address incrementally, and it’s also the core of fast measurement. But if the address area region to be addressed is divided into several blocks with continuous addresses in each block, and the addresses between blocks are discontinuous, the efficiency of the binary mode will be low; for example: the address area region to be addressed includes three blocks, the address range of the three blocks is as follows: 0x0000 ~ 0x3FFF, 0x10000 ~ 0x13FFF, and 0x20000 ~ 0x23FFF, the address interval of the three blocks is larger than the area region to be addressed, so the test using the binary mode is not efficient.

To solve these problems, a new type of address register is disclosed in this example, on the basis of retaining the configuration mode and binary mode of the address register, more addressing modes are supported, such as gray mode and selective mode.

As shown in FIG. 19A and FIG. 19B, the new type of address register includes a plurality of edge-triggered flip-flop registers, at least one counter logics, at least one shifter logic, a selective addressing modular and at least two multiplexers; the input ports include a reset signal RST, a clock signal CLK, a shift enable signal SE, and a shift data input signal SI, the outputs ports include an address signal ADDR and a code mode signal GB; the edge-triggered flip-flop registers include several first edge-triggered flip-flop registers for receiving address signal, several second edge-triggered flip-flop registers for receiving mode control signal and several third edge-triggered flip-flop registers for receiving auxiliary data; one or more counter logics includes a first counter logic; two or more multiplexers including a first multiplexer and a second multiplexer.

A selective addressing modular can have the functions as follow: the current address is confirmed whether to belong to the address area region to be addressed; if the current address belongs to the address area region to be addressed, the current address is processed to next address (address+1) and outputs the next address signal into the second multiplexer; if the current address belongs to the address area that does not required addressing, then skips the address area and outputs the starting address signal of the next address area region to be addressed as next address into the second multiplexer.

The internal connection of the address register is as follows: an input D of the plurality of edge-triggered flip-flop registers is coupled to a data output of the first multiplexer; an input R of the plurality of edge-triggered flip-flop registers is coupled to a reset (RST) pad of the address register; an input CK of the plurality of edge-triggered flip-flop registers is coupled to a clock (CLK) pad of the address register; an output Q of the several first edge-triggered flip-flop registers is further coupled to an address (ADDR) pad of the address register, an output Q of the several second edge-triggered flip-flop registers is further coupled to a code mode (GB) pad of the address register; the inputs of the shifter logic are coupled to an output Q of the plurality of edge-triggered flip-flop registers and the shift data input (SI) pad of the address register; an input of the first counter logic is coupled to an output Q of the several first edge-triggered flip-flop registers; an input of the selective addressing modular is coupled to an output Q of the several first and third edge-triggered flip-flop registers; the inputs of the second multiplexer are coupled to an output Q of the several second edge-triggered flip-flop registers, an output of the first counter logic and an output of the selective addressing modular; the inputs of the first multiplexer are coupled to the shift enable signal SE, an output of the second multiplexer, and an output of the shifter logic.

The new type of address register supports at least two addressing modes for continuous test, such as binary mode and selective mode; the mode control signal controls the second multiplexer, the signal to choose the address register to work in one of alternative continuous test mode.

The binary mode can be as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the address signal is outputted through ADDR and GB of the address register; meanwhile, the first counter logic processes the current address to next address (address+1) and outputs the next address signal into the second multiplexer; when the binary mode is selected, each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexers.

The selective mode can be as follows: the first edge-triggered flip-flop registers receives current address signal in binary code format, the address signal is outputted through ADDR and GB of the address register; meanwhile, the third edge-triggered flip-flop registers receives auxiliary data as selection table, the information in the selection table is about address area whether region to be addressed, according to this information the current address is confirmed whether to belong to the address area region to be addressed; if the current address belongs to the address area region to be addressed, the current address is processed to next address (address+1) and outputs the next address signal into the second multiplexers, when the selective mode is selected, each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexers; if the current address belongs to the address area that does not required addressing, then skips this address area, the next address is the starting address of the next address area region to be addressed, and the next address signal is outputted into the second multiplexer, when the selective mode is selected, each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexers.

In this embodiment, for the selection table, the size of the minimum address area is predefined, whether each minimum address area by order is an address area region to be addressed is depending on the data in the selection table is 1 or 0. For example: the address area region to be addressed includes three blocks with continuous addresses in each block, the address range of the three blocks is as follows: 0×0000~ 0×3FFF, 0×10000 ~ 0×13FFF, and 0×20000 ~ 0×23FFF; if the minimum address area size is 0×4000 (i.e. 128×128, which is the same size as array in the test chip), the corresponding between these address areas whether region to be addressed and the data in the selection table is as following Table 1.

TABLE 1 data address area whether region to be addressed 1 0×0000 ~ 0×3FFF yes 0 0×4000 ~ 0×7FFF no 0 0×8000 ~ 0×BFFF no 0 0×C000 ~ 0×FFFF no 1 0×10000 ~ 0×13FFF yes 0 0×14000 ~ 0×17FFF no 0 0×18000 ~ 0×1BFFF no 0 0×1C000 ~ 0×1FFFF no 1 0×20000 ~ 0×23FFF yes 0 0×24000 ~ 0×27FFF no

In the above table, the data in the selection table is 10 bits (extensible), 1 in the selection table refers to the corresponding address area is the address area region to be addressed, 0 in the selection table refers to the corresponding address area is not required addressing. After the data in the selection table is configuration, the address process of the address register can be as follows:

a. 0×0000~ 0×3FFF within addressing range, so continuous addressing; b. 0×4000 found not in addressing range, skip this area; c. 0×8000 still out of addressing range, skip this area; d. 0×C000 still out of addressing range, skip this area; e. 0×10000 ~ 0×13FFF within addressing range, start continuous addressing; f. 0×14000 found not in addressing range, skip this area; g. 0×18000 still out of addressing range, skip this area; h. 0×1C000 still out of addressing range, skip this area; i. 0×20000 ~ 0×23FFF within addressing range, start continuous addressing; j. 0×24000 found not in addressing range, skip this area; k. 0×28000 out of address area, address meaningless.

In some embodiments, the address register further includes at least one gray decoder and at least one gray encoder, the one or more counter logics further include a second counter logic; an input of the gray decoder is coupled to an output Q of the several first edge-triggered flip-flop registers, an output of the gray decoder is coupled to an input of the second counter logic; an input of the gray encoder is coupled to an output of the second counter logic, an output of the gray encoder is coupled to an input of the second multiplexer. The address register with gray decoder and gray encoder is able to convert address signal between binary code and gray code, i.e., the address register also supports the gray mode for continuous test. The gray mode is as follows: the first edge-triggered flip-flop registers receives current address signal in gray code format, and the address signal is outputted through ADDR and GB of the address register; meanwhile, the gray decoder converts the current address form gray to binary, then the second counter logic processes the current address to next address (address+1), finally the gray encoder converts the next address from binary to gray, the next address signal is outputted into the second multiplexer, when the gray mode is selected, each time the edge of the clock signal is changed, the next address signal is entered into the first edge-triggered flip-flop registers as new current address signal through the second and the first multiplexers.

In contrast to the binary mode, the address signal in the gray mode is encoded. The characteristic of gray code is that the expression of the two numbers before and after has only one bit of data difference, and this characteristic can greatly improve the stability of chip. In an example, 0-15 are listed in binary code format and gray code format in the following Table 2.

TABLE 2 Decimal binary code gray code 0 0000 0000 1 0001 0001 2 0010 0011 3 0011 0010 4 0100 0110 5 0101 0111 6 0110 0101 7 0111 0100 8 1000 1100 9 1001 1101 10 1010 1111 11 1011 1110 12 1100 1010 13 1101 1011 14 1110 1001 15 1111 1000

In some embodiments, the first counter logic and the second counter logic are the same one, and the address register further includes a control logic, the control logic chooses this counter logic to work as the function of the first counter logic or the function of the second counter logic.

In some embodiments, the address register also includes a scan data output signal (SO) output port, which outputs one bit of the address signal which is configured to check whether DUT is the one we want to test. In some embodiments, the scan data output signal SO is the lowest bit of the address signal.

As shown in FIG. 19C, the new type of address register is 32-bit register including 20 first edge-triggered flip-flop registers, 2 second edge-triggered flip-flop registers and 10 third edge-triggered flip-flop registers; the 20 first edge-triggered flip-flop registers provide 20 address bits for receiving address signal (19:0), the 2 second edge-triggered flip-flop registers provide 2 address bits for receiving mode control signal (21:20), the 10 third edge-triggered flip-flop registers provide 10 address bits for receiving auxiliary data (31:22).

In this embodiment, the 2-bit mode control signal is configured for continuous addressing as follows: when it is 00, the binary mode is selected; when it is 01, the gray mode is selected, the gray mode is the most stable addressing mode, and is generally adopted when the binary mode is unstable; when it is 10, the selective mode is selected, in this addressing mode the 10-bit auxiliary data (31:22) is selection table, in other addressing modes, the 10 bits of 31:22 are meaningless; signal 11 is undefined for addressing mode, and is reserved for extending more addressing modes in the future.

Example 6

An addressable test chip mainly includes two parts: DUTs and peripheral circuits, and the peripheral circuit refers to the switching circuit. As shown in FIG. 20 , DUTs are placed in the form of DUTs array, and each DUT occupies a specified width, the peripheral circuit consists of a plurality of peripheral circuit units, each of which will also occupy a specified width. The partial enlargement in FIG. 20 shows the optimal scenario, which is that the array is composed of the same DUTs, each DUT occupies the same width, and each peripheral circuit unit also occupies the same width with the DUT, so the peripheral circuit unit can be placed in one-to-one correspondence with DUT. However, in practice, the occupied width of the peripheral circuit unit is often different from the occupied width of the DUT; as shown in FIG. 21 , the ratio of the occupied width of the DUT to the occupied width of the peripheral circuit unit is 2.016:2, resulting in a poor one-to-one correspondence between the two parts, even if the occupied width of the peripheral circuit unit is larger than the occupied width of the DUT, then peripheral circuit units that simply placed in order may exceed the peripheral circuit area; in addition, the array can be composed of different DUTs, which occupy different widths, making the situation more complicated.

In the current design method of addressable test chip, the co-design of “DUTs” and “peripheral circuits” is not considered, the two parts are designed separately and then connected together, resulting in the use of extra chip area. For high-density test chips, the extra chip area affects the density of DUTs. To solve the above technical problem, this disclosure provides a design method of peripheral circuit in a test chip, in which the characteristics of the “DUTs” and “peripheral circuits” will be consideration at the initial stage, and the peripheral circuit will be designed specifically to further reduce the occupied area of connecting the two parts and improve the density of DUTs in a test chip.

A design method of peripheral circuit in a test chip includes the following steps: obtain the information of a device array, obtain the information of the DUTs selected from the device array; obtain the information of the peripheral circuit area in the test chip for placing the peripheral circuit; design the peripheral circuits according to the DUTs in the edge row or/and edge column of the device array, including: in the peripheral circuit area, configure the corresponding peripheral circuit units for the DUTs in the edge row or/and edge column of the device array, and place the peripheral circuit units as shown in FIG. 22 , connect the DUTs of the device array and the corresponding peripheral circuit units through a wiring to form a peripheral circuit, which is used to control the DUTs to be tested through the state of the peripheral circuit units.

In this embodiment, selecting the DUTs from the device array to be tested includes: select several DUTs in the edge row of the device array. In some embodiments, selecting the DUTs from the device array to be tested includes: select several DUTs in the edge column of the device array, or select several DUTs in the edge row and edge column of the device array; when the device array is multiple rows and columns, selecting the DUTs from the device array to be tested also includes: select several DUTs in the remaining rows or/and remaining columns of the device array.

In this embodiment, a corresponding peripheral circuit unit is configured for each DUT in the edge row or/and edge column of the device array. In some embodiments, according to practical requirements several corresponding peripheral circuit units are configured for each DUT in the edge row or/and edge column of the device array, or a corresponding peripheral circuit unit is configured to be shared by several DUTs in the edge row or/and edge column of the device array.

In this embodiment, the preset maximum number of peripheral circuit units configured for the DUTs in an edge row is M, and, the preset maximum number of peripheral circuit units configured for the DUTs in an edge column is N; write the number of devices in an edge rows or/and edge columns as K, so selecting the DUTs to be tested from the edge row or/and edge column of the device array is including: if the number of devices in an edge row K≤M or/and the number of devices in an edge column K≤N, select all the devices to be DUTs in the edge row or/and edge column; if the number of devices in an edge row K>M, select M devices to be DUTs in the edge row, or/and the number of devices in an edge column K>N, select N devices to be DUTs in the edge column. For example, in this embodiment, set M=64, N=64, this presetting can ensure the successful winding of the peripheral circuit.

In some embodiments of the present disclosure, the row direction of an edge row or the column direction of the edge column is defined as X direction, and the peripheral circuit units to be placed meet the following three conditions:

-   The first condition: the projection of the peripheral circuit unit     and the projection of its corresponding DUT overlap in the X     direction; -   The second condition: there is no overlap in the X direction of the     projection of peripheral circuit units in the same row or column; -   The third condition: the peripheral circuit unit are placed within     the peripheral circuit area.

In some embodiments, the steps of placing the peripheral circuit units are as follows:

-   Step 1: Write the number of rows in an array of the peripheral     circuit units as I, and the number of rows i here refers to the     number of rows in an array of the peripheral circuit units or the     number of columns in an array of the peripheral circuit units; based     on the first condition, place the peripheral circuit units in a     single row, i.e., set i =1, and judge whether the peripheral circuit     units after the single row arrangement meet the second and third     conditions:     -   if yes, the position arrangement of the peripheral circuit units         is completed, the steps end; for example, as shown in FIG. 22 ,         the position arrangement of the peripheral circuit units for a         one-dimensional DUT array meets the second and third conditions;         as shown in FIG. 23 , the position arrangement of the peripheral         circuit units for a two-dimensional DUT array meets the first,         second and third conditions;     -   if the second or third condition is not met, proceed to Step 2;         for example, as shown in FIG. 24 and FIG. 25 , the position         arrangement of the peripheral circuit units for a         one-dimensional DUT array do not meets the first, second or         third conditions; as shown in FIG. 26 and FIG. 27 , the position         arrangement of the peripheral circuit units for a         two-dimensional DUT array do not meets the first, second or         third conditions, and these cases are proceeded to Step 2; -   Step 2: move either of the two overlapping peripheral circuit units     in the X direction to a new row by the moving direction is     perpendicular to the X direction, and/or move the peripheral circuit     units which beyond the peripheral circuit area to a new row based on     the first condition, i.e. increase one row in the array of the     peripheral circuit units, set i = i +1; and judge whether the     rearranged peripheral circuit units meet the second and third     conditions: if yes, the position arrangement of the peripheral     circuit units is completed, the steps end, if the second or third     condition is not met, perform this Step 2 again. for example, the     position arrangement of the peripheral circuit units for a     one-dimensional DUT as shown in FIG. 29 by increasing one row in the     array of the peripheral circuit units; and the position arrangement     of the peripheral circuit units for a two-dimensional DUT as shown     in FIG. 30 by increasing one row in the array of the peripheral     circuit units.

In this embodiments, the Step 1 includes: when the peripheral circuit units are determined not to meet the second and third conditions, adjust the peripheral circuit units’ positions in the X direction to optimize the location arrangement based on the first, second and third conditions, and judge whether the peripheral circuit units after the single row arrangement meet the second and third conditions: if yes, the position arrangement of the peripheral circuit units is completed, the steps end, if the second or third condition is not met, proceed to Step 2; for example, after adjusting the position arrangement of the peripheral circuit units as shown in FIG. 26 by using the method in this step, as shown in FIG. 28 the position arrangement of the peripheral circuit units meets the first, second or third conditions; after adjusting the position arrangement of the peripheral circuit units by using the method in this step, as shown in FIG. 24 and FIG. 27 the position arrangement of the peripheral circuit units do not meet the first, second or third conditions, and this case is proceed to Step 2.

In some embodiments of the present disclosure, the Step 1 and Step 2 also include: when the peripheral circuit units are determined to meet the second and third conditions, adjust the peripheral circuit units’ positions in the X direction to optimize the location arrangement based on the first, second and third conditions, further reduce the length of the wiring for connecting the DUTs and the corresponding peripheral circuit units. For example, after adjusting the position arrangement of the peripheral circuit units as shown in FIG. 29 by using the method in this step, as shown in FIG. 31 the position arrangement of the peripheral circuit units makes the sum of length of the wiring for connecting the DUTs and the corresponding peripheral circuit units to achieve the shortest.

In some embodiments of the present disclosure, selecting the DUTs from the device array to be tested includes: as shown in FIG. 32 select several DUTs in the edge row and edge column of the device array, and select several DUTs row by row and column by column in the remaining rows and columns of the device array, the DUTs selected in FIG. 32 and FIG. 33 are distinguished by shadow filling; this sequence can also be used for connecting the DUTs and peripheral circuit units subsequently. In this step of selecting DUTs from the device array, if there are several optional devices, select the device with a shorter connection distance to be tested, or select the device according to the requirements of external input.

In some embodiments of the present disclosure, the peripheral circuit area is between the device array and the pad region, or/and between the device array and the edge of the test chip. A peripheral circuit unit is a switching circuit unit, which is used to control a DUT to be tested through the state of the switching circuit unit; and a peripheral circuit is a switching circuit.

In some embodiments of the present disclosure, an addressable test chip includes a plurality of test pads, at least one addressing circuit(s), at least one switching circuit, i.e., peripheral circuit, and a plurality of devices under test (DUTs); the peripheral circuit is designed by the above design method of peripheral circuit in a test chip. As shown in Table 3, according to the comparative experiment, compared with the addressable test chip designed by the current design method, the device density of the addressable test chip in which the peripheral circuit is designed by the above design method in this disclosure can be further improved, and the number of metal layers for interconnection can be reduced effectively.

TABLE 3 Type of a test chip Design method Density of DUTs Number of metal layers MPW current design method 100,000 / mm² 2 design method of the embodiments 1,000,000 / mm² 2 Scribe line current design method 200,000 / mm² 6 design method of the embodiments 1,000,000 / mm² 6 current design method 40,000 / mm² 4 design method of the embodiments 150,000 / mm² 4 current design method unachievable 2 design method of the embodiments 40,000 / mm² 2

In the present disclosure, the device array refers to that the devices are placed in the form of row × column, the number of devices in each row and column can be different, the devices in the device array are not required to be the same height or width, and the devices are not required to be placed standardly like a matrix, unless otherwise explicitly defined.

Example 7

For ultra-high density test chips, it is also objectively required to match them for ultra-high-speed testing. Traditional testing methods require a significant amount of time to complete testing, which simply cannot meet practical needs. At present, tens to hundreds of thousands of test keys (test structures/test units) are placed in each module (test unit), as shown in FIG. 1 . Address switching is achieved through clock signal (CLK) port level switching (from low potential to high potential), thereby achieving the switching of the tested test keys. Measurements are conducted on ports such as DF to obtain the electrical parameters of the tested test keys.

Some testing methods are implemented through a number of testing algorithms, such: CLK inputs a pulse, DF uses SMU measurement, and so on, repeating until all test keys are tested. This method is fully implemented through algorithmic command control, where each step involves software and hardware communication, hardware initialization, and other steps, making the entire testing process very lengthy. For example, a dense Array module containing 327K test keys would take approximately 5 days to measure full map using this method; And it is also prone to issues such as test data misalignment.

It should be noted that the address register contains a scan data output signal (SO) output port, which outputs the lowest valid bit of the address signal to validate the correctness of the test DUT. The device to be tested can constitute a DUT array, and the DUTs within the same DUT array are selected in order of address during testing; therefore, a DUT array contains all addresses for the duration of the test.

Various embodiments of the present disclosure provide a method for ultra-high speed measurement of high density test chips, including a function generator and SMUs located in the test equipment, the function generator is connected to the CLK pad of the address register in the test chip via a probe card, and the SMU is a measurement SMU, which is connected to the test pads (i.e. switch circuit end) DF, DL in the test chip via a probe card, thus providing voltage and data testing in the test chip; as shown in FIG. 34 , including the following steps:

Step S1, the signals required for the test are preset and written into the memory of the function generator and the SMU; the preset signals can be PGU signals (CLK/clock signals) and SMU signals (DF signals/test signals), i.e., the function generator performs waveform transformation at what time length frequency and the SMU performs continuous sampling at what time length sampling rate.

Step S2, control the function generator and the SMU to generate synchronous trigger CLK signal and DF signal i.e., the signal timing of the CLK/DF side is triggered simultaneously, the address register switches the address according to the waveform transformation in the CLK signal received by its CLK pad, and triggers the SMU to continuously samples the different addresses according to the frequency of the DF signal.

Step S3, obtains the sampling data and determines the valid measurement value corresponding to each address from the sampling data.

In some embodiments, the exemplary function generator is set as the pulse generator PGU and the SMU is set as the measurement SMU.

In some embodiments, as shown in FIG. 35 , a testing algorithm is also provided.

In some embodiments, the configuration information for the signals required to test the device to be tested is preset in the test algorithm. And the configuration information can include information about the pulse generator PGU (CLK) signal and the SMU (DF) signal, such as the operating voltage (VDD) of the pulse generator PGU and the SMU, the frequency (freq) of the PGU, the power line cycle/sampling power cycle (PLC) of the SMU, the sampling continuous time (seqtime) and other parameters, where the seqtime determines the test duration.

In some embodiments, After the setting of PGU/SMU signal is completed in the test algorithm, it will be written into the memory of the pulse generator PGU and SMU correspondingly; if the test begins, the trigger signal is sent through the test algorithm, and the test equipment receives and transmits the trigger signal to achieve synchronous triggering of the pulse generator PGU and SMU, specifically to generate the CLK signal and DF signal for synchronous triggering. The signal timing at the CLK side and DF side is shown in FIG. 36 .

In some embodiments, the trigger signal may include the frequency parameter of the CLK signal, the sampling continuous time of the SMU.

In addition, to ensure that there is no problem of missing measurement of the device to be measured or incorrect data corresponding to the address, the sampling speed of the SMU may be multiples the frequency of the PGU, such as setting the frequency of the PGU (CLK) signal to f, then the SMU will measure at N × f frequency, N is a positive integer greater than or equal to 1.

In some embodiments, N equals 1, then each test data can be assigned to each address using data alignment analysis, thereby avoiding the misalignment of test data that existed in the prior art.

In some other embodiments, N is greater than 1, then the stability interval can be determined by data analysis among multiple test points corresponding to each address, and then the most accurate valid measurement value can be determined from the test points in the stability interval and assigned to each address, thereby avoiding the problem of misaligned test data and test key being missed in the prior art in a more comprehensive manner.

In some embodiments, in order to achieve the technical purpose of synchronous triggering, the test equipment is also equipped with a programmable logic device at the hardware setting level, as shown in FIG. 37 . The output of the programmable logic device is electrically connected to the function generator and the SMU, and the programmable logic device obtains the trigger signal of the test algorithm and transmits it to the function generator and the SMU, controls the function generator to generate the CLK signal, and the programmable logic device generates a clock signal simultaneously, which is transmitted to the SMU to generate a synchronous trigger DF signal and conduct continuous sampling to realize synchronous trigger function generator and SMU to generate CLK signal and DF signal respectively, and the address register connected with the function generator switches the address according to the CLK signal, while the SMU conducts continuous sampling according to the synchronous trigger DF signal, each address corresponds to multiple sampling data.

In some embodiments, the test equipment comprises a programmable logic device, a synchronous trigger module, and a clock module, as shown in FIG. 37 , to achieve the technical purpose of synchronous triggering at the hardware setting level. The output of the programmable logic device is connected to the inputs of the synchronous trigger module and the clock module. The synchronous trigger module contains two synchronous output ports, one of which is electrically connected to the function generator (FGen), and the other is electrically connected to the input of the clock module. The output of the clock module is connected to the SMU.

The programmable logic device obtains the trigger signal of the test algorithm and transmits it to the synchronous trigger module, which controls the function generator and clock module to generate the CLK signal and clock signal synchronously; the clock signal of the clock module is passed to the SMU, which determines the DF signal (measurement signal) according to the clock signal for continuous sampling; the function generator (PGU) inputs the clock signal (CLK) to the address register for address switching; through the CLK signal and each address bit device in the test chip has distinct address bits. The function generator (PGU) inputs the clock signal (CLK) into the address register through the CLK pad for address switching; each device in the test chip has a unique address bit, and the CLK signal corresponds to each address bit device in the test chip; the test equipment achieves continuous sampling for each address bit device through the SMU; the test results are temporarily stored in the SMU or external memory; the test results are transmitted to an external memory; the tester extracts and stores all the test data into the database through the test algorithm, and then analyzes the test results using the online analysis engine.

In some embodiments, the programmable logic device may be a field programmable gate array (FPGA) as well as other programmable logic devices, such as programmable array logic (PAL), generic array logic (GAL), etc. In this application embodiment the programmable logic device is an FPGA.

In some embodiments, the sampled data may include SO voltage (output signal voltage) and DF current, and the method for determining the valid measurement value corresponding to each address from the plurality of sampled data specifically includes: determination of the stability interval in each address based on the SO voltage switching conditions; Analytical determination of valid measurements from multiple DF currents located within each address’s stability interval; Assign the analyzed valid measurement values to each address.

In some embodiments, the determination of the stability interval in each address based on SO voltage switching conditions also includes the steps of: arranging the measured SO voltages in order of measurement by arranging the SO voltages of all measurement points within a DUT array in the order of measurement; According to the numerical relationship between the SO voltage and the operating voltage VDD, the voltage level of each SO voltage is determined in turn.

The voltage level variation of each SO voltage is determined based on the difference with the voltage level of the preceding SO voltage; the valid measurement points locations within the stability interval are determined based on the voltage level variation of the adjacent SO voltages. Referring to FIG. 39 , for instance, a measurement before and after relationship such as V12 and V13, V12 is the SO voltage of V13 before it was altered.

In some embodiments, the illustration will be supplemented with a specific case to clarify the data processing procedure. A waveform with a CLK pad input frequency is set to f, and the SMU measures at a frequency of 5 × f. In the case of synchronous triggering, as shown in FIG. 38 , the CLK pad triggers the switching address, while the SMU triggers synchronous measurement of the port voltage/current signal.

Depending on the corresponding frequency setting, the SO voltage at each address will be measured five times and the analog signal port (DFx) at each address will be measured five times, resulting in the signal frequency and sampling as shown in FIG. 39 .

From the 5 current measurements of DFx (In1 to In5, n [1, last address number] and integer), the most accurate current value in the stable interval of the corresponding address is selected; additionally, ADDR0 is measured before the signal trigger and is not in the periodic measurement cycle.

In some embodiments, Specifically, determining the stability interval in each address by the SO voltage switching situation, includes the following steps:

-   arrangement of measured SO voltages in measurement order, optionally     including arrangement of all measured points V(SO) passing through a     DUT array in measurement order; -   adding the parameter level, which is used to calculate the SO output     voltage level, results in the following formula for the parameter     level: level=if{V(SO)<Vdd/2,0:1} (Vdd is the working voltage, and     Vdd=0.9 in the real column), which means that if the SO voltage is     less than half of the working voltage, the parameter level is 0;     otherwise, it is 1; -   add the parameter transition, which signifies a change in the     voltage level, and calculate the parameter transition using the     following formula: transition=if{abs(level_(n+1)-level_n)>0, 1:0 },     that is, the parameter of calculating the voltage of two SOs before     and after if the absolute value of the difference of level is     greater than 0, if it is greater than 0 then the parameter     transition is 1, otherwise it is 0; -   Add the parameter validmeasure to indicate whether the measurement     point is a valid measurement point in the stability interval. The     parameter validmeasure is calculated by the following equation:     -   validmeasure=if{ OR(transition_(n-1)=1, transition         _n=1,transition_(n+1)=1), 0:1},that is, whether they belong to         the valid measurement points of the stability interval is         determined by whether the parameter transitions with the two         adjacent SO voltages before and after are 1; if the three         parameter transitions are 0, they belong to the valid         measurement points of the stability interval.

In some embodiments, when a stability interval contains multiple valid measurement points, the selection of one of the valid measurement values is taken in the following method: taking the first current measurement within the stability interval; Taking the current average of multiple DF currents within the stability interval; Take the median of the multiple DF currents in the stability interval.

In some embodiments, as shown in FIG. 40 , the left side shows the details of parameter level, parameter transition, and parameter validmeasure calculated after data processing. The first current measurement value from the parameter validmeasure of 1 is then selected as a valid measurement point for each address.

In some embodiments, this disclosure also provides a test system, illustrated in FIG. 37 and FIG. 41 , including a Database, an Online Analysis Engine, a Function Generator (FGen), a Switching Matrix Module (SWM), and at least six SMUs, addressable Test Chip combined with multiple-used Address Register, and a probe card to form a complete test system.

In some embodiments, in the above test system, the first SMU in the test instrument is connected to the probe card, which is connected to the addressable test chip via power pads VDD and VSS; the second SMU is connected to the switch matrix module (SWM), which is connected to the address register via input pads SE (shift enable signal terminal) and SI (shift input signal terminal); the multiple-used address register is connected to the addressing circuit signal input in the addressable test chip; the third SMU is connected to the multi-used address register via the input pad RST (reset signal side) and the function generator (FGen) is connected to the multi-purpose address register via the input pad CLK (clock signal side); the fourth, fifth and sixth SMU are connected to the probe card, while the probe card is connected to the switching circuit via pads DF, DL, GF, GL, SF, SL and BF (the signal line terminals of the to-be-tested device); the address register is connected to the addressing circuit via pads; the online analysis engine is connected to the database, the function generator (FGen), and the measurement SMU.

In some embodiments, on this basis, the test system of this embodiment further comprises a programmable logic device (FPGA), the programmable logic device is connected to the function generator and the SMU; the programmable logic device obtains the trigger signal of the test algorithm and transmits it to the function generator and the SMU, controls the function generator to generate the CLK signal, at the same time the programmable logic device generates a clock signal, the clock signal is transmitted to the SMU to generate a synchronous trigger DF signal and conduct continuous sampling to realize synchronous trigger function generator and SMU to generate CLK signal and DF signal respectively; the address register connected to the function generator switches the address according to the CLK signal, and the SMU conducts continuous sampling according to the synchronous trigger DF signal, wherein each address corresponds to one or more sampling data.

In some embodiments, the test system includes programmable logic device (FPGA), synchronous trigger module, and clock module; The programmable logic device obtains the trigger signal of the test algorithm and transmits to the synchronous trigger module; The synchronous trigger module controls the function generator and the clock module to synchronously generate clock signals of different frequencies; the multi-used address register connected with the function generator (FGen) switches the address according to the transformation of the waveform in the clock signal, and the clock signal of the clock module is passed to the SMU for continuous sampling based on the frequency of its clock signal, with each address corresponding to multiple sampling data.

In some embodiments, the programmable logic device outputs are connected to the inputs of the synchronous trigger module, the clock module, which contains two synchronous output ports, one of which is connected to the function generator (FGen), and the output of the clock module, which is connected to the fourth SMU.

In some embodiments, the programmable logic device obtains the test algorithm’s trigger signal and transmits it to the synchronous trigger module, which directs the function generator and clock module to generate the CLK signal and clock signal synchronously; the clock signal of the clock module is transmitted to the fourth SMU, which uses the clock signal to determine the DF signal (measurement signal) for continuous sampling. The function generator (which can be a pulse generator) inputs the clock signal (CLK) into the address register via the CLK pad for address switching; the CLK signal corresponds to each address bit device in the test chip, and the test equipment accomplishes continuous sampling for each address bit device via the fourth SMU; the test results are temporarily stored in the fourth SMU or in an external memory; after the test is complete, the test equipment extracts and stores all the test data in the database using the test algorithm, and analyses the test results using the online analysis engine/data processing software (the data processing software can be located in the online analysis engine) to determine the valid measurement value corresponding to each address from the multiple sample data.

In some embodiments, through the hardware synchronous trigger with SMU continuous sampling method to achieve ultra-high-speed test, only the hardware and software coordination, hardware initialization, and other steps are performed at the very beginning of the test, while the rest of the test is completely controlled by the hardware, which can significantly improve the test efficiency and effectively enhance the test data’s stability.

The various device components, modules, circuits, components, blocks, or portions may have modular configurations, or are composed of discrete components, but nonetheless can be referred to as “modules” in general. In other words, the “components,” “modules,” “circuits,” “blocks,” “portions,” or “units” referred to herein may or may not be in modular forms, and these phrases may be interchangeably used.

In the present disclosure, the terms “installed,” “connected,” “coupled,” “fixed” and the like shall be understood broadly, and can be either a fixed connection or a detachable connection, or integrated, unless otherwise explicitly defined. These terms can refer to mechanical or electrical connections, or both. Such connections can be direct connections or indirect connections through an intermediate medium. These terms can also refer to the internal connections or the interactions between elements. The specific meanings of the above terms in the present disclosure can be understood by those of ordinary skill in the art on a case-by-case basis.

While this specification contains many specific implementation details, these should not be construed as limitations on the scope of any claims, but rather as descriptions of features specific to particular implementations. Certain features that are described in this specification in the context of separate implementations can also be implemented in combination in a single implementation. Conversely, various features that are described in the context of a single implementation can also be implemented in multiple implementations separately or in any suitable subcombination.

Moreover, although features can be described above as acting in certain combinations and even initially claimed as such, one or more features from a claimed combination can in some cases be excised from the combination, and the claimed combination can be directed to a subcombination or variation of a subcombination. Similarly, while operations are depicted in the drawings in a particular order, this should not be understood as requiring that such operations be performed in the particular order shown or in sequential order, or that all illustrated operations be performed, to achieve desirable results. In certain circumstances, multitasking and parallel processing can be advantageous. Moreover, the separation of various system components in the implementations described above should not be understood as requiring such separation in all implementations, and it should be understood that the described program components and systems can generally be integrated together in a single software product or packaged into multiple software products.

As such, particular implementations of the subject matter have been described. Other implementations are within the scope of the following claims. In some cases, the actions recited in the claims can be performed in a different order and still achieve desirable results. In addition, the processes depicted in the accompanying drawings do not necessarily require the particular order shown, or sequential order, to achieve desirable results. In certain implementations, multitasking or parallel processing can be utilized.

It is intended that the specification and embodiments be considered as examples only. Other embodiments of the disclosure will be apparent to those skilled in the art in view of the specification and drawings of the present disclosure. That is, although specific embodiments have been described above in detail, the description is merely for purposes of illustration. It should be appreciated, therefore, that many aspects described above are not intended as required or essential elements unless explicitly stated otherwise.

Various modifications of, and equivalent acts corresponding to, the disclosed aspects of the example embodiments, in addition to those described above, can be made by a person of ordinary skill in the art, having the benefit of the present disclosure, without departing from the spirit and scope of the disclosure defined in the following claims, the scope of which is to be accorded the broadest interpretation so as to encompass such modifications and equivalent structures.

It should be understood that “a plurality” or “multiple” as referred to herein means two or more. “And/or,” describing the association relationship of the associated objects, indicates that there may be three relationships, for example, A and/or B may indicate that there are three cases where A exists separately, A and B exist at the same time, and B exists separately. The character “/” generally indicates that the contextual objects are in an “or” relationship.

In the present disclosure, it is to be understood that the terms “lower,” “upper,” “under” or “beneath” or “underneath,” “above,” “front,” “back,” “left,” “right,” “top,” “bottom,” “inner,” “outer,” “horizontal,” “vertical,” and other orientation or positional relationships are based on example orientations illustrated in the drawings, and are merely for the convenience of the description of some embodiments, rather than indicating or implying the device or component being constructed and operated in a particular orientation. Therefore, these terms are not to be construed as limiting the scope of the present disclosure.

Moreover, the terms “first” and “second” are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, elements referred to as “first” and “second” may include one or more of the features either explicitly or implicitly. In the description of the present disclosure, “a plurality” indicates two or more unless specifically defined otherwise.

In the present disclosure, a first element being “on” a second element may indicate direct contact between the first and second elements, without contact, or indirect geometrical relationship through one or more intermediate media or layers, unless otherwise explicitly stated and defined. Similarly, a first element being “under,” “underneath” or “beneath” a second element may indicate direct contact between the first and second elements, without contact, or indirect geometrical relationship through one or more intermediate media or layers, unless otherwise explicitly stated and defined.

Some other embodiments of the present disclosure can be available to those skilled in the art upon consideration of the specification and practice of the various embodiments disclosed herein. The present application is intended to cover any variations, uses, or adaptations of the present disclosure following general principles of the present disclosure and include the common general knowledge or conventional technical means in the art without departing from the present disclosure. The specification and examples can be shown as illustrative only, and the true scope and spirit of the disclosure are indicated by the following claims. 

What is claimed is:
 1. A test system comprising: a probe card; a test apparatus; and a test path coupling an addressable test chip with the test apparatus through the probe card; and said address register is integrated in one of said probe card or the addressable test chip; wherein: the test apparatus includes a function generator, a source measurement unit, and a programmable logic device; the programmable logic device is configured to acquire the trigger signal of the test algorithm and transmits it to the function generator and the source measurement unit, synchronously triggers the function generator and the source measurement unit to generate CLK signals and DF signals respectively; the address register connected to the function generator switches addresses according to the CLK signal; the source measurement unit continuously samples according to the DF signal triggered synchronously; and each address corresponds to multiple sampling data.
 2. The test system of claim 1, wherein: the sampling frequency of the source measurement unit’s continuous sampling is multiplicative related to the address switching frequency; each address corresponds to one or more sampling data, and the valid measurement value corresponding to each address is obtained from the analysis of the sampling data.
 3. The test system of claim 1, wherein the test apparatus is configured to implement an ultra-high speed measurement operation based on a preset test algorithm, in which signal configuration information is preset and the trigger signal is sent through the test algorithm control; the test equipment receives and transmits the trigger signal and simultaneously triggers said function generator and source measurement unit.
 4. The test system of claim 3, wherein the trigger signal comprises the frequency parameter of the CLK signal and the sampling continuous time of the source measurement unit.
 5. The test system of claim 3, wherein: the test equipment includes a synchronous trigger module and a clock module; the programmable logic device obtains the trigger signal of the test algorithm and passes to the synchronous trigger module; the synchronous trigger module controls the function generator and the clock module to synchronously generate the CLK signal and the clock signal; the clock signal of the clock module transmits to the source measurement unit to generate the synchronous DF signal for synchronous triggering.
 6. The test system of claim 2, wherein: the sampling data includes SO voltage and DF current, and the method for determining the valid measurement value corresponding to each address from the plurality of sampling data corresponding to each address includes: determining a stability interval in each address by means of the SO voltage switching conditions; analyzing the plurality of the DF currents to determine valid measured values located within the stability interval at each address; assigning the analyzed valid measured values to the corresponding address.
 7. The test system of claim 6, wherein: the step to determine the stability interval in each address based on SO voltage switching conditions includes: arranging the measured SO voltages in order of measurement; determining (each) voltage level of the SO voltage in succession based on its numerical relationship to the operating voltage VDD; determining the change in voltage level of (each) SO voltage based on the difference from the voltage level of the previous SO voltage; determination of valid measurement points within to the stability interval based on the change in voltage level of said SO voltage adjacent to it.
 8. The test system of claim 7, wherein: valid measurement points within the stability interval are precisely determined as follows: a valid measurement point is selected based on the fact that there is no voltage change between a given SO voltage and the adjacent SO voltages before and after it.
 9. The test system of claim 6, wherein: a selection of the valid measurement value is taken by taking a first current measurement value in the stability interval; taking the current average of the plurality of DF currents in the stability interval; taking the median of the plurality of DF currents in the stability interval.
 10. A test system comprising a function generator, source measurement units, a programmable logic device, a synchronous trigger module, and a clock module; the programmable logic device obtains the trigger signal of the test algorithm and transmits it to the synchronous trigger module, the synchronous trigger module controls the function generator and the clock module to synchronously generate clock signals of different frequencies; the address register connected to the function generator switches the address according to the address register connected to the function generator switches the address according to the transformation of the waveform in the clock signal; and the clock signal of the clock module is transmitted to the source measurement units to generate the synchronous trigger DF signal and conduct continuous sampling, each address corresponds to one or more sampling data. and continuous sampling, with each address corresponding to multiple sampling data.
 11. An ultra-high-speed measurement method implemented with the test system of claim 10, comprising: presetting the required test signals and writing them to the memory of the function generator and SMU; controlling the function generator and the SMU to generate synchronously triggered CLK signals and DF signals, respectively; the address register switching addresses based on the transformation of waveforms in the CLK signals, triggering the SMU to continuously sample different addresses based on the frequency of the DF signals; acquiring the sampling data and deriving the valid measurement value for each address from the sampling data.
 12. The method of claim 11, wherein a sampling frequency for continuous sampling by the SMU is multiplicatively related to the address switching frequency; each address corresponds to one or more sampling data, and the valid measurement value corresponding to each address is derived from the analysis of the sampling data.
 13. The method of claim 12, wherein execution of the ultra-high speed measurement method is based on a predetermined test algorithm in which signal configuration information is predetermined and a trigger signal is sent through the test algorithm control; the test equipment receives and transmits the trigger signal and simultaneously triggers the function generator and the SMU.
 14. The method of claim 13, wherein the trigger signal includes the frequency parameter of the CLK signal and the continuous sampling time of the SMU.
 15. The method of claim 14, wherein a programmable logic device, a synchronous trigger module, and a clock module are included on the test equipment. The programmable logic device acquires the trigger signal of the test algorithm and transmits it to the synchronous trigger module. The synchronous trigger module then controls the function generator and the clock module to synchronously generate the CLK signal and the clock signal. The clock signal of the clock module is transmitted to the SMU to generate a synchronously triggered DF signal.
 16. The method of claim 15, wherein the programmable logic devices include: field programmable gate array (FPGA).
 17. The method of claim 16, wherein the sampling data includes SO voltage and DF current, and determining the valid measurement value corresponding to each address from multiple sampling data corresponding to each address comprises: determining a stability interval in each address using the SO voltage switching situation; analyzing a number of the DF currents to determine the valid measurements located within the stability interval of each address; and assigning the analyzed valid measurement values to each address.
 18. The method of claim 17, wherein the determining of the stability interval in each address based on the SO voltage transition condition includes: arrangement of the measured SO voltages in measurement order; determining (each) voltage level of the SO voltage based on its numerical relationship with the operating voltage VDD; determining the change in voltage level of (each) SO voltage based on the voltage level difference from the preceding SO voltage; wherein validity of measurement points within the stability interval is determined by the change in voltage level between adjacent SO voltage.
 19. The method of claim 18, wherein determining the valid measurement points that fall within the stability interval specifically by: given that the voltage of one SO and the voltages of the adjacent SOs before and after it do not change, this point is selected as a valid measurement point.
 20. The method of claim 19, wherein: selecting valid measurement values comprises obtaining a first current measurement in the stabilization interval; obtaining the current average of the plurality of DF currents in the stability interval; taking the median of the numerous DF currents in the stability interval; the test system further comprises SMUs; and the programmable logic device obtains the trigger signal of the test algorithm and transmits it to the function generator and the SMU, and synchronously triggers the function generator and the SMU to generate the CLK signal and the DF signal, respectively. The address register connected to the function generator switches the address according to the CLK signal, while the SMU performs continuous sampling according to the synchronously triggered DF signal, with each address corresponding to a plurality of sampled data. 